Nanoimprint Fabrication and Thermal Behavior of Atomically Ultrasmooth Glass Substrates with 0.2-nm-Height Steps
スポンサーリンク
概要
- 論文の詳細を見る
We examined the conditions for the development of atomically stepped ultrasmooth surfaces on commercial silicate glass substrates by the thermal nanoimprint technique using sapphire ($\alpha$-Al<sub>2</sub>O<sub>3</sub> single crystal) molds with 0.2-nm-height atomic steps. Under the pressing conditions of 3 MPa, 300 s, and 610 °C for imprinting, a 0.2-nm-high stepped and atomically ultrasmooth terraced surface could be formed on soda-lime silicate glass substrates having the glass transition temperature of 521 °C. We found that the 0.2-nm-height step structure of the imprinted glass surface disappeared after annealing at 490 °C, and the smoothness of the terrace increased.
- 2011-07-25
著者
-
HIRAI Yoshihiko
Graduate School of Engineering, Osaka Prefecture University
-
Miyake Yumiko
Department Cardiology Koshigaya Hospital Dokkyo University School Of Medicine
-
Kaneko Satoru
Department Of Obstetrics And Gynecology Ichikawa General Hospital Tokyo Dental College
-
Oi Hideo
Kyodo International Inc., Kawasaki, 215-0005, Japan
-
Yoshimoto Mamoru
Department of Innovative & Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan
-
Akita Yasuyuki
Department of Innovative & Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan
-
Sunagawa Kazuhiko
Namiki Precision Jewel Co., Ltd., Adachi, Tokyo 123-8511, Japan
-
Mita Masahiro
Kyodo International Inc., Kawasaki 215-0005, Japan
-
Koyama Kohji
Namiki Precision Jewel Co., Ltd., Adachi, Tokyo 123-8511, Japan
-
Tada Kazuhiro
Toyama National College of Technology, Toyama 939-8630, Japan
-
Kaneko Satoru
Department of Innovative and Engineered Materials, Tokyo Institute of Technology, Yokohama 226-8503, Japan
関連論文
- Optimal Design for Nonperiodic Fine Grating Structure Controlled by Proximity Correction with Electron-Beam Lithography
- P052 Thyroid dysfunction causes the impaired myocardial fatty acid utilization with I-123 BMIPP imaging
- Twin-Free Epitaxial Films Lateral Relation between YSZ(111) and Si(111)
- Anderson Transition of Three Dimensional Phonon Modes
- Can Symmetric Texture Reproduce the Unitarity Triangle and m_b/m_T?(Particles and Fields)
- Symmetric Mass Matrix with Two Zeros in SUSY SO(10) GUT, Lepton Flavor Violations and Leptogenesis(Particles and Fields)
- The Effect of Emergency Aortocoronary Bypass, Infarctectomy and Ventricular Aneurysmectomy on Arrhythmias in Patients with Acute and Chronic Myocardial Infarctions : SYMPOSIUM ON SURGICAL TREATMENT OF ARRHYTHMIAS
- Expansion and shrinkage in the redox process of (Mg,Ni)O solid solutions for preparation of steam reforming catalysts in SOFCs
- EFFECTS OF ANGIOTENSING ON THE MOTILITY OF HUMAN SPERM
- Phenomenology of supersymmetric TeV scale seesaw model
- Simultaneous determination of six adenyl purines in human plasma by high-performance liquid chromatography with fluorescence derivatization
- Fabrication of Ni/Al2O3/Ni Heteroepitaxial Junction by Post-Hydrogen Reduction of NiO/Al2O3/NiO Trilayered Epitaxial Thin Film
- Lead-Free Low-Melting and Semiconductive Vanadate Glass Applicable to Low-Temperature Sealing
- Fabrication of Ferromagnetic Ni(111) Nanoparticles Embedded Epitaxially in (Mg,Ni)O Matrix by Reduction of (Mg0.5Ni0.5)O(111) Epitaxial Thin Film
- Nanoimprint Fabrication and Thermal Behavior of Atomically Ultrasmooth Glass Substrates with 0.2-nm-Height Steps
- Twin-Free Epitaxial Films Lateral Relation between YSZ(111) and Si(111)
- Supercell Structure on Continuous Growth of Bi2Sr2Ca1Cu2Ox Film
- Effect of Strain on Supercell Structure of Bismuth Cuprate Superconducting Film
- Large Lattice Misfit on Epitaxial Thin Film: Coincidence Site Lattice Expanded on Polar Coordinate System
- Evolution of Atomically Stepped Surface of Indium Tin Oxide Thin Films Grown on Nanoimprinted Glass Substrates
- Synthesis of Mica Thin Film by Pulsed Laser Deposition
- Cantilever Fabrication by Force-Free Release Transfer
- Sheath Voltage Estimation for Inductively Coupled Plasma Etcher by Impedance Analysis
- Neutrino Mass Matrix with Two Zeros and Leptogenesis(SUMMER INSTITUTE 2003)
- Room-Temperature Epitaxial Growth of (Li,Ni)O Thin Film with Li Content up to 60 mol %
- Neutrino Mass Matrix with Two Zeros and Leptogenesis(Seesaw and leptogenesis,Flavor Mixing, CP Violation and Origin of Matter)
- Growth of Nanocubic MgO on Silicon Substrate by Pulsed Laser Deposition
- Epitaxial Indium Tin Oxide Film Deposited on Sapphire Substrate by Solid-Source Electron Cyclotron Resonance Plasma
- Influence of Rapid Thermal Annealing and Substrate Terrace Width on Self-Organizing Formation of Periodic Straight Nanogroove Array on NiO(111) Epitaxial Thin Film
- Optimal Design for Nonperiodic Fine Grating Structure Controlled by Proximity Correction with Electron-Beam Lithography
- Fabrication of Cantilevers by Two-Step Transfer Process without Lithography
- Synthesis and Thermal Conductivity of Boron-Doped and 12C-Enriched Diamond Single Crystals
- Atomically Stepped Glass Surface Formed by Nanoimprint
- Low-Temperature Heteroepitaxial Growth of $\alpha$-Al2O3 Thin Films on NiO Layers by Pulsed Laser Deposition
- Separation of human X- and Y-bearing sperm using free-flow electrophoresis.
- Evaluation of Template Release Energy with Use of Fluorinated Segregation Agents for UV Nanoimprint Resists