Optimal Design for Nonperiodic Fine Grating Structure Controlled by Proximity Correction with Electron-Beam Lithography
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-02-15
著者
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Okano M
Nalux Co. Ltd.
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OKANO Masato
NALUX Co., Ltd.
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HIRAI Yoshihiko
Graduate School of Engineering, Osaka Prefecture University
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KIKUTA Hisao
Graduate School of Engineering, Osaka Prefecture University
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