Proximity Correction for Fabricating a Chirped Diffraction Grating by Direct-Writing Electron-Beam Lithography

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Optimal Design for Nonperiodic Fine Grating Structure Controlled by Proximity Correction with Electron-Beam Lithography
Proximity Correction for Fabricating a Chirped Diffraction Grating by Direct-Writing Electron-Beam Lithography
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Synthesis of Wave Plates Using Multilayered Subwavelength Structure
Proximity Correction for Fabricating a Chirped Diffraction Grating by Direct-Writing Electron-Beam Lithography

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