New Passive Alignment Method of Channel Waveguide Device Using Height Control Spacers
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-01
著者
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Yamamoto K
Kobayasi Institute Of Physical Research
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Yokoyama Toshifumi
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Yamamoto K
Storage Media Systems Development Center Matsushita Elec. Ind. Co. Ltd.
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YAMAMOTO Kazuhisa
Storage Media Systems Development Center, Matsushita Electric Industrial Co. Ltd.
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KITAOKA Yasuo
Storage Media Systems Development Center, Matsushita Elec. Ind. Co., Ltd.
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Yokoyama T
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Kitaoka Yasuo
Storage Media Systems Development Center Matsushita Elec. Ind. Co. Ltd.
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Kitaoka Y
Storage Media Systems Development Center Matsushita Elec. Ind. Co. Ltd.
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Yokoyama T
Tokai Univ. Kanagawa Jpn
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