Charge Build-Up in Magnetron-Enhanced Reactive Ion Etching : Etching
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-30
著者
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林 卓
Department Of Materials Science Shonan Institute Of Technology
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HAYASHI Toshio
ULVAC Japan Co., Ltd.
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HOGA Hiroshi
Toppan Printing Co., Lid.
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HOGA Hiroshi
Oki Electric Industry Co., Ltd.
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Hoga Hiroshi
Oki Electric Industry Co. Ltd.
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Yokoyama Toshifumi
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Yokoyama T
Storage Media Systems Development Center Matsushita Electric Industrial Co. Ltd.
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ORITA Toshiyuki
Oki Electric Industry Co., Ltd.
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YOKOYAMA Takashi
Oki Electric Industry Co., Ltd.
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Yokoyama T
Tokai Univ. Kanagawa Jpn
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Orita Toshiyuki
Oki Electric Industry Co. Ltd.
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Hayashi Toshio
Ulvac Corporation
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