Observation of Induction Power Dependence on the Magnetic Neutral Loop Discharge Plasma Thermalization Phenomena
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概要
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A few years ago, the concept of magnetic neutral line discharge plasma was presented, and a preliminary experiment demonstrated its usefulness in plasma processing. Subsequently, the electron behavior was analyzed theoretically, and the possibility of a high energy gain of electrons due to meandering motion in the magnetic neutral loop under a rf induction field along the loop was revealed. Recently, evidence has been found that the stronger the applied rf power is, the easier is the thermalization of electrons. Here, the results of studying this dependence are reported and the reason for the dependence is presented.
- 1997-10-15
著者
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Uchida Taijiro
Ulvac Japan Ltd
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HAYASHI Toshio
ULVAC Japan Co., Ltd.
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Tsuboi Hideo
ULVAC JAPAN, Ltd.
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Tsuboi Hideo
Ulvac Japan Ltd.
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Hayashi Toshio
Ulvac Corporation
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Hayashi Toshio
Ulvac Japan Ltd.
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