Collisionless Heating of Electrons by Meandering Chaos and Its Application to a Low-Pressure Plasma Source

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概要

• 論文の詳細を見る

• Near a magnetic neutral line, where the magnetic field vanishes, the adiabatic invariants of charged particle motion are destroyed, and hence the number of degrees of freedom increases. When a radio-frequency electric field is applied to the system, the particle motion becomes strongly chaotic. This effect can be used to produce heat in a plasma in the absence of any collisional process. The kinetic entropy of an electron orbit increases very rapidly by the mixing effect. The velocity distribution is approximated by a Gaussian function, so the thermodynamic entropy production can also be estimated. This collisionless heating mechanism enables high-efficiency plasma production at a low gas pressure.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1997-07-15

著者

• Uchida Taijiro

  Ulvac Japan Ltd

• Yoshida Zensho

  Faculty Of Engineering University Of Tokyo

• Uchida Taijiro

  ULVAC Japan, Ltd., Chigasaki, Kanagawa 253, Japan

• Asakura Hiroaki

  Faculty of Engineering, University of Tokyo, Hongo, Tokyo 113, Japan

• Takemura Ko

  Faculty of Engineering, University of Tokyo, Hongo, Tokyo 113, Japan

関連論文

• Electron Temperature and Density Profiles in a Neutral Loop Discharge Plasma
• Usefulness of Magnetic Neutral Loop Discharge Plasma in Plasma Processing
• Observation of Induction Power Dependence on the Magnetic Neutral Loop Discharge Plasma Thermalization Phenomena
• Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing
• Plasma Production Using Energetic Meandering Electrons
• Collisionless Heating of Electrons by Meandering Chaos and Its Application to a Low-Pressure Plasma Source

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