Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing

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概要

• 論文の詳細を見る

• A new plasma processing method is presented. Use of plasma produced in a closed magnetic neutral line is essential and the merit is easily illustrated in principle with a preliminary experimental result. This method is considered to be useful for many kinds of plasma processing.

• 社団法人応用物理学会の論文
• 1994-01-01

著者

• Uchida Taijiro

  Ulvac Japan Ltd

関連論文

• Electron Temperature and Density Profiles in a Neutral Loop Discharge Plasma
• Usefulness of Magnetic Neutral Loop Discharge Plasma in Plasma Processing
• Observation of Induction Power Dependence on the Magnetic Neutral Loop Discharge Plasma Thermalization Phenomena
• Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing
• Plasma Production Using Energetic Meandering Electrons
• Collisionless Heating of Electrons by Meandering Chaos and Its Application to a Low-Pressure Plasma Source

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