Plasma Production Using Energetic Meandering Electrons

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概要

• 論文の詳細を見る

• When an electron is accelerated by an oscillating electric field in an inhomogeneous magnetic field which has a null point, it meanders along a chaotic orbit. The kinetic energy becomes larger than that of regular motion in an off-resonant homogeneous magnetic field. This effect explains the high efficiency of plasma production in the neutral line discharge (NLD).

• 社団法人応用物理学会の論文
• 1995-08-15

著者

• Uchida T

  Ulvac Japan Ltd. Kanagawa Jpn

• Uchida Taijiro

  Ulvac Japan Ltd

• Yoshida Zensho

  Faculty Of Engineering University Of Tokyo

関連論文

• Electron Temperature and Density Profiles in a Neutral Loop Discharge Plasma
• Usefulness of Magnetic Neutral Loop Discharge Plasma in Plasma Processing
• Observation of Induction Power Dependence on the Magnetic Neutral Loop Discharge Plasma Thermalization Phenomena
• Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing
• Plasma Production Using Energetic Meandering Electrons
• Collisionless Heating of Electrons by Meandering Chaos and Its Application to a Low-Pressure Plasma Source

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