Observation of Characteristics of Magnetic Neutral Loop Discharge Plasma Appearing at Antenna in RF Circuit

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概要

• 論文の詳細を見る

• The characteristics of magnetic neutral loop discharge (NLD) plasma have been studied by measurement of a high voltage appearing at an antenna in RF circuit. Peak-to-peak voltage $V_{\text{pp}}$ at the antenna coil supplying power into plasma varied depending on the configuration and strength of the magnetic field. By analysis of the measured $V_{\text{pp}}$ using the equivalent circuit model, it is deduced quantitatively that the power deposited into plasma in NLD is larger than that deposited in inductively coupled plasma (ICP).

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2007-11-15

著者

• Tsuboi Hideo

  Ulvac Japan Ltd.

• Tsuboi Hideo

  ULVAC, Inc., 2500 Hagizono, Chigasaki, Kanagawa 253-8543, Japan

• Ogata Seiji

  ULVAC, Inc., 2500 Hagizono, Chigasaki, Kanagawa 253-8543, Japan

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• Observation of Characteristics of Magnetic Neutral Loop Discharge Plasma Appearing at Antenna in RF Circuit

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