Measurements of Parameters of Two-Electron-Temperature Plasma Produced by Electron Cyclotron Resonance

概要

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Langmuir probe measurements were carried out for two-electron-temperature plasmas (T_<eb> and T_<et>; bi-Max wellian) produced by electron cyclotron resonance (ECR). The tail electron temperatures were observed not only in the ECR region but also in the downstream region. The tail temperatures (T_<eb> 9.6 〜 24.0 eV) in the downstream region were higher than those (7.6×12.3 eV) in the ECR region, whereas the tail densities (N_<et>〜10^9 cm^<-3>) in the downstream region were one order of magnitude lower than those (〜10^<10> cm^<-3>) in the ECR region.
社団法人応用物理学会の論文
1994-04-01