Variation in Preferred Orientations of TiN Thin Films Prepared by Ion Beam Assisted Deposition

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概要

• 論文の詳細を見る

• The effects of various experimental conditions on the preferred orientations of titanium nitride (TiN) thin films were investigated. These films were formed on Si (100) wafers and sapphire (0001) substrates by ion beam assisted deposition (IBAD) with various N/Ti transport ratios, N ion incidence angles, film thicknesses and substrate temperatures. The acceleration voltage of the incident ions was 1 kV. The preferred orientation of the TiN films changed from (111) to (100) as the N/Ti transport ratios and ion incidence angles increased. This phenomenon is caused by the selective damage to crystal growth due to the energy of the bombarding particles. It was also found that an increase in film thickness changed the preferred orientation of the TiN (100) film to a (100) plus (110) orientation. Furthermore, this orientation reverted to (100) with the heating of the substrate during film preparation. It is concluded that these phenomena were caused by the process of minimizing the overall energy. Thus, the heating of the substrate was useful for synthesizing thick TiN (100) films in this preparation method. Transmission electron microscopy (TEM) observation of TiN (100) films suggested that these films had good crystallinity.

• 社団法人日本材料学会の論文
• 2001-03-15

著者

• TAKAHASHI Yutaka

  Department of Physics, The Cancer Institute, Japanese Foundation for Cancer Research

• 山口 浩一

  Department Of Electronic Engineering

• 林 卓

  Department Of Materials Science Shonan Institute Of Technology

• TAKAHASHI Yoshikazu

  Ibaraki Prefectural University of Health Sciences

• Takahashi Y

  Ulvac Japan Ltd. Ibaraki Jpn

• Takahashi Yoshihiro

  Department Of Applied Physics School Of Engineering Tohoku University

• Takahashi Y

  Ntt Basic Research Laboratories Ntt Cornoration

• 山口 浩一

  電気通信大学電子工学科

• Hayashi T

  Research Laboratory Oki Electric Industry Co. Ltd.

• Takahashi Y

  Tanaka Solid Junction Project Erato Japan Science And Research Corporation

• Hayashi T

  Nisshin Electric Co.

• Hayashi Tsukasa

  R D Division Nissin Electric Co. Ltd.

• YAMAGUCHI Katsumi

  Japan Space Utilization Promotion Center

• HAYASHI Toshiyuki

  Department of Neurosurgery, Saiseikai Utsunomiya Hospital

• Takahashi Yoichi

  Department Of Nuclear Engineering Faculty Of Engineering University Of Tokyo

• Hayashi Takahisa

  Vlsi Research & Development Center Oki Electric Industry Co Ltd.

• Hayashi Takafumi

  Department Of Applied Physics Faculty Of Engineering The University Of Tokyo

• Yamaguchi Kiyoshi

  Faculty Of Engineering Osaka Institute Of Technology

• Yamaguchi Katsumi

  Department Of Mechanical Engineering Nagoya University

• Hayashi Toshiyuki

  Department Of Mechanical Engineering Nagoya University

• Hayashi Toshiyuki

  Department Of Ergonomics Faculty Of Engineering Chiba University

• Hayashi Takayoshi

  Advanced Research Institute For Science And Engineering Waseda University

• Hayashi Takayoshi

  Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation

• Takahashi Yukihiro

  Central Research Laboratory Matsushita Electric Industrial Co. Ltd.

• 林 卓

  マテリアル工学科

• MATSUMURO Akihito

  Department of Mechanical Engineering, Nagoya University

• MURAMATSU Mutsuo

  Department of Mechanical Engineering, Nagoya University

• KOHZAKI Masao

  Department of Mechanical Engineering, Nagoya University

• Takahashi Y

  Department Of Applied Physics School Of Engineering Tohoku University

• Takahashi Yoshinori

  Division Of Electrical Electronic And Information Engineering Osaka University

• Kohzaki Masao

  Department Of Mechanical Engineering Nagoya University

• Muramatsu Mutsuo

  Department Of Mechanical Engineering Nagoya University

• Matsumuro Akihito

  Department Of Mechanical Engineering Aichi Institute Of Technology

• Yuki Kazue

  Otorhinolaryngology Nara Medical University

• Takahashi Y

  National Inst. Animal Health Ibaraki Jpn

• 山口 浩一

  電気通信大学電気通信学部電子工学科

• YAMAGUCHI Kazufumi

  Wireless Research Laboratory, Matsushita Electric Industrial Co., Ltd.

• Takahashi Y

  Department Of Molecular & Materials Sciences Kyushu University

• Hayashi Toshiyuki

  Department Of Applied Chemistry National Defence Academy

• HAYASHI Teru

  Research Laboratory of Precision Machinery and Electronics,Tokyo Institute of Technology

• Takahashi Yutaka

  Department Of Electrical Engineering Yamagata Univ.

• Yamaguchi Kazuhiko

  Institute For Laser Science University Of Electro-communications

• Takahashi Yutaka

  Department Of Applied Systems Science Graduate School Of Engineering Kyoto University

• Yamaguchi Katsumi

  Department of Biotechnology and Life Sciences, Tokyo University of Agriculture and Technology

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