Chemical Processing of (Zr, Sn)TiO_4 Dielectrics through Metal Alkoxide Route and Their Microwave Characteristics
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金属アルコキシドを用いたゾルゲル法による(Zr, Sn)TiO_4マイクロ波帯用誘電体の化学的合成について研究した。金属アルコキシドの加水分解反応を制御することにより, 化学的に均質な(Zr, Sn)TiO_4の単分散球状粒子を合成することが出来た。この粒子の成形体を690℃で仮焼後, 1600℃で焼結することにより, 焼結助剤を含まないち密な(Zr_<0.80>Sn_<0.20>)TiO_4セラミックスが得られた。ち密な焼結体(理論密度96%以上)は, 優れた誘電特性を示し, ε_r=30.0,Q=5000,τ_f=3ppm/℃ (10GHz)であった。誘電定数は, 焼結体の密度および格子定数の変化に依存したが, Q値は, 主に酸素欠陥に依存した。ZrTiO_4をSn^<4+>で置換固溶すると誘電定数は増加した。これはC軸長の増加によるイオン分極の増大によるものであった。
- 1991-03-31
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