Study of Deposition Process in Modulated RF Silane Plasma (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
The influences of plasma parameters on the deposition of a-Si:H film and particle growth have been studied with silane discharge using amplitude-modulated RF methods. Plasma parameters have been measured with the Langmuir probe system and optical emission spectrometer. Behaviors and generation processes of particles have been observed by the laser scattering method. The deposited thin film has been characterized by various techniques such as Fourier-transform infrared (FT-IR) spectrometry, ESR and the constant photocurrent method (CPM). High deposition rate with low particle density as well as high film quality has been realized for a-Si:H film by amplitude-modulated RF methods.
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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MURAKAMI Hiroshi
Department of Mechanical Engineering, Faculty of Engineering, Kyushu Sangyo University
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林 卓
Department Of Materials Science Shonan Institute Of Technology
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Maeda Hiroshi
Department of Urology, Shinko Clinic
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Doi Akira
Department Of Inorganic Materials Nagoya Institute Of Technology
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HAYASHI Tsukasa
Department of Electrical Engineering University
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OHTANI Satoshi
Department of Pediatric Surgery, Niigata University
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NAKAMURA Nobuyuki
Department of Applied Chemistry, Faculty of Engineering, Kumamoto University
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Ohtani S
Fijitsu Lab. Ltd. Kanagawa Jpn
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Ohtani Satoshi
Department Of Pediatric Surgery Niigata University
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Murakami Hiroshi
Department Of Endocrinology Clinical Institute Of Endocrinology Tokyo Women's Medical Universit
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KIRIMURA Hiroya
Department of Display Devices, R & D Division, Nissin Electric Co., Ltd.
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NAKAHIGASHI Takahiro
Department of Display Devices, R & D Division, Nissin Electric Co., Ltd.
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TABATA Takao
Department of Display Devices, R & D Division, Nissin Electric Co., Ltd.
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KOBAYASHI Masanao
Department of Display Devices, R & D Division, Nissin Electric Co., Ltd.
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MITSUDA Yoshie
Department of Display Devices, R & D Division, Nissin Electric Co., Ltd.
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KUWAHARA Hajime
Department of Display Devices, R & D Division, Nissin Electric Co., Ltd.
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Tabata Takao
Department Of Display Devices R & D Division Nissin Electric Co. Ltd.
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Mitsuda Yoshie
Department Of Display Devices R & D Division Nissin Electric Co. Ltd.
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Kirimura Hiroya
R D Division Nissin Electric Co. Ltd.
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Kobayashi Masanao
R D Division Nissin Electric Co. Ltd.
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Maeda Hiroshi
Department Of Urology Kurashiki Central Hospital
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Murakami Hiroshi
Department Of Endocrinology And Metabolism Hirosaki University Graduate School Of Medicine
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Nakamura Nobuyuki
Department Of Display Devices R & D Division Nissin Electric Co. Ltd.
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Doi Akira
Department Of Display Devices R & D Division Nissin Electric Co. Ltd.
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Murakami Hiroshi
Department Of Biochemistry And Cell Biology Graduate School Of Medicine Nagoya City University
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Maeda Hiroshi
Department Of Experimental Pathology Cancer Institute
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Maeda Hiroshi
Department Of Advanced Materials Science And Engineering Graduate School Of Engineering Yamaguchi Un
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Murakami Hiroshi
Department Of Display Devices R & D Division Nissin Electric Co. Ltd.
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OHTANI Satoshi
Department of Display Devices, R & D Division, Nissin Electric Co., Ltd.
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DOI AKIRA
Department of Applied Chemistry, Okayama University of Science
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Kobayashi Masanao
Department of Chemistry, Faculty of Science, Tohoku University
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Murakami Hiroshi
Department of Applied Chemistry, Nagoya Institute of Technology
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