D28 Development of a Measuring System for Micro Hole Accuracy Using an Optical Fiber Probe : Evaluation of Measurement Repeatability(Nano/micro measurement and intelligent instruments)

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概要

• 論文の詳細を見る

• This paper presents a micro hole measuring system using an optical fiber probe. The probe is deflected when it comes into contact with a hole surface, and this deflection is measured optically. In this research, the accuracy and repeatability of such measurement are examined by measuring a roughness standard specimen and a micro hole. The results clarify that the probe has a resolution of 15 nm and the repeatability error for 10 measurements of a roughness standard specimen is within ±0.1μm in touch trigger mode and ±0.03μm in scanning mode.

• 一般社団法人日本機械学会の論文
• 2009-12-01

著者

• MURAKAMI Hiroshi

  Department of Mechanical Engineering, Faculty of Engineering, Kyushu Sangyo University

• KAWAGOISHI Norio

  Department of Mechanical Engineering, Graduate School of Science and Engineering, Kagoshima Universi

• KONDO Eiji

  Department of Mechanical Engineering, Graduate School of Science and Engineering, Kagoshima Universi

• KATSUKI Akio

  Department of Chemistry, Faculty of Education, Shinshu University

• Katsuki Akio

  Depatment Of Mechanical Engineering Fac. Of Engineering Kyushu Univ.

• SAJIMA TAKAO

  Departments of Intelligent Machinery and Systems, Kyushu University

• Onikura Hiromichi

  Department Of Intelligent Machinery & Systems Faculty Of Engineering Kyushu University

• HONDA Tomohiro

  Department of Mechanical Engineering, Graduate School of Science and Engineering, Kagoshima Universi

• Honda Tomohiro

  Department Of Mechanical Engineering Graduate School Of Science And Engineering Kagoshima University

• Honda Tomohiro

  Department Of Mechanical Engineering Fukuoka University

• Katsuki Akio

  Department Of Mechanical Engineering Faculty Of Engineering Kyushu University

• Katsuki Akio

  Department Of Chemistry Faculty Of Education Shinshu University

• Kondo Eiji

  Department Of Mechanical Engineering Graduate School Of Science And Engineering Kagoshima University

• Sajima Takao

  Department Of Mechanical Engineering Faculty Of Engineering Kyushu University

• Sajima Takao

  Department Of Intelligent Machinery And Systems Faculty Of Engineering Kyushu University

• Murakami Hiroshi

  Department Of Endocrinology Clinical Institute Of Endocrinology Tokyo Women's Medical Universit

• Kondo Eiji

  Department Of Intelligent Machinery And System Graduate School Of Engineering Kyushu University

• Kawagoishi Norio

  Department Of Mechanical Engineering Graduate School Of Science And Engineering Kagoshima University

• Murakami Hiroshi

  Department Of Endocrinology And Metabolism Hirosaki University Graduate School Of Medicine

• Kondo Eiji

  Department Of Anatomy & Neuroscience Osaka University Medical School

• Murakami Hiroshi

  Department Of Biochemistry And Cell Biology Graduate School Of Medicine Nagoya City University

• Murakami Hiroshi

  Department Of Mechanical Engineering Graduate School Of Science And Engineering Kagoshima University

• Murakami Hiroshi

  Department of Applied Chemistry, Nagoya Institute of Technology

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