Influence of Deposition Temperatures on Bonding State and Microstructure of Carbon Nitride Thin Films Prepared by Ion-Beam-Assisted Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-04-15
著者
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林 卓
Department Of Materials Science Shonan Institute Of Technology
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山口 浩一
電気通信大学電子工学科
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HAYASHI Toshiyuki
Department of Neurosurgery, Saiseikai Utsunomiya Hospital
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Hayashi Takafumi
Department Of Applied Physics Faculty Of Engineering The University Of Tokyo
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Yamaguchi Katsumi
Department Of Mechanical Engineering Nagoya University
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Hayashi Toshiyuki
Department Of Ergonomics Faculty Of Engineering Chiba University
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Hayashi Takayoshi
Advanced Research Institute For Science And Engineering Waseda University
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MATSUMURO Akihito
Department of Mechanical Engineering, Nagoya University
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MURAMATSU Mutsuo
Department of Mechanical Engineering, Nagoya University
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KOHZAKI Masao
Department of Mechanical Engineering, Nagoya University
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Kohzaki Masao
Department Of Mechanical Engineering Nagoya University
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Muramatsu Mutsuo
Department Of Mechanical Engineering Nagoya University
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Matsumuro Akihito
Department Of Mechanical Engineering Aichi Institute Of Technology
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山口 浩一
電気通信大学電気通信学部電子工学科
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Hayashi Toshiyuki
Department Of Applied Chemistry National Defence Academy
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Yamaguchi Katsumi
Department of Biotechnology and Life Sciences, Tokyo University of Agriculture and Technology
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