Chemical Processing and Dielectric Properties of Ferroelectric SrBi_2Ta_2O_9 Thin Films
スポンサーリンク
概要
- 論文の詳細を見る
Ferroelectric SrBi_2Ta_2O_9 (SBT) thin films were prepared on Pt/SiO_2/Si substrates at 800℃ by MOD and sol-gel methods. SBT thin films prepared by the MOD method using strontium 2-ethylhexanoate, bismuth 2-ethylhexanoate and tantalum ethoxide showed a fine-grained structure with grain sizes of about 130 nm. The SBT thin films with a thickness of 400 nm exhibited ε_r of about 180, P_r of about 4.5 μC/cm^2 and E_c of 60 kV/cm. No fatigue was observed up to 10^9 switching cycles. On the other hand, in sol-gel method, SBT thin films crystallized with a high (105) diffraction intensity at 650℃, but with a highly (00l) preferred orientation at 800℃. The thin film showed grain sizes of 100-300 nm. The sol-gel derived 390 nm-thick SBT films with random orientation exhibited ε_r of about 100, P_r about 2.8 μC/cm^2 and E_c of 108 kV /cm.
- 社団法人応用物理学会の論文
- 1996-09-30
著者
-
HAYASHI Takashi
Department of Materials Science, Shonan Institute of Technology
-
林 卓
Department Of Materials Science Shonan Institute Of Technology
-
HARA Takuya
Department of Materials Science and Ceramic Technology, Shonan Institute of Technology
-
Takahashi Hiroshi
Department Of Cardiology Nihon University Surugadai Hospital
-
Hayashi Takafumi
Department Of Applied Physics Faculty Of Engineering The University Of Tokyo
-
Hayashi Takayoshi
Advanced Research Institute For Science And Engineering Waseda University
-
Hayashi Takashi
Department Of Applied Chemistry Graduate School Of Engineering Osaka University
-
Takahashi Hiroshi
Department Of Applied Aquabiology National Fisheries University
-
HARA Takuya
Department of Applied Chemistry and Biotechnology, Graduate School of Engineering, Chiba University
関連論文
- Response of Serum Carboxylated and Undercarboxylated Osteocalcin to Risedronate Monotherapy and Combined Therapy with Vitamin K2 in Corticosteroid-Treated Patients: A Pilot Study
- Fabrication and Properties of (Bi,La)4Ti3O12 Thin Films through Metal-Organic Compounds (特集 高精度電子部品材料)
- Fabrication and Properties of Ge-Doped (Bi, Nd)_4Ti_3O_ Thin Films by Chemical Solution Deposition
- Synthesis of (Bi, Nd)_4(Ti, Ge)_3O_ Thin Films by Chemical Solution Deposition
- Excimer UV Processing of (Bi,Nd)_4Ti_30_ Ferroelectric Thin Films by Chemical Solution Deposition Method
- 06-P-02 Low-Temperature Processing of (Bi, Nd)_4Ti_3O_ Thin Films from Alkoxide Precursors Solution Using Excimer UV Irradiation
- Preparation and Properties of Bi_La_xTi_3O_ Ferroelectric Thin Films Using Excimer UV Irradiation
- Isolable Iron(II)-Porphycene Derivative Stabilized by Introduction of Trifluoromethyl Groups on the Ligand Framework
- Chemical Properties of Sperm Whale Myoglobins Reconstituted with Monopropionate Hemins
- Enhancement of Peroxygenase Activity of Horse Heart Myoglobin by Modification of Heme-propionate Side Chains
- Formation and Cleavage of a Dicobalt Complex Bridged with a Pentamethylene Group
- Interfacial Recognition between Reconstituted Myoglobin Having Charged Binding Domain and Electron Acceptor via Electrostatic Interaction
- Molecular Recognition by Novel Macrotetracyclic Cyclophanes Having Dipeptide Segments
- A case of early myoclonic encephalopathy with the congenital nephrotic syndrome
- A case of large neonatal arteriovenous malformation with heart failure Color Doppler sonography, MRI and MR angiography as early non-invasive diagnostic procedures
- Optic nerve hypoplasia with hypopituitarism and an arachnoid cyst
- Inhomogeneous Vasodilatory Responses of Rat Tail Arteries to Heat Stress : Evaluation by Synchrotron Radiation Microangiography
- Pineocytoma with Intratumoral Hemorrhage Following Ventriculoperitoneal Shunt : Case Report
- LET Distributions Measured at the CERF Facility with the RRMD-III
- ケミカルプロセッシングによるジルコニア含有ムライト複合体の調製 : (セラミック材料小特集)
- ジルコニウムアルコキシドを用いたZrO_2-コーティングBaTiO_3複合粒子の合成と評価(セラミック材料)
- Synthesis and Properties of Alkylperoxocobalt(III)Porphyrin and Porphycene
- Raman Studies of the Effects of Nb Dopant on the Ferroelectric Properties in Lead Titanate Thin Film
- Low-Temperature Processing of Pb(Zr_ Ti_)O_3 Thin Films by Sol-Gel Casting
- Urinary Metabolites of Valproic Acid in Epileptic Patients
- Chemical Processing of (Zr, Sn)TiO_4 Dielectrics through Metal Alkoxide Route and Their Microwave Characteristics
- A Very-High-Conductivity of In-Doped CdTe Film : Surfaces, Interfaces and Films
- In Doping in CdTe Film by Co-Evaporation of CdTe and In
- Processing and Properties of Rare Earth Ion-Doped Bismuth Titanate Thin Films by Chemical Solution Deposition method
- Chemical Solution Processing and Properties of (Bi,Nd)_4Ti_3O_ Ferroelectric Thin Films
- 2L17 化学溶液法による Bi_Nd_xTi_3O_ 強誘電体薄膜の低温作製
- 高温焼成でアナターゼ型酸化チタン薄膜を合成
- 3E01 安定前駆体ゾルからの Pb(Zr_Ti_)O_3 薄膜の結晶化と電気特性に及ぼす組成と積層構造の影響
- 3D09 Sr_Bi_Ta_2O_9 薄膜および焼結体の微構造と誘電的特性
- 2G03 家庭用電子レンジによる部分安定化ジルコニアの緻密化 (2)
- 1D07 アルコキシド-水酸化物を用いた La 添加 BaTiO_3 微粒子の低温合成
- Low-Temperature Sintering and Properties of (Pb, Ba, Sr)(Zr, Ti, Sb)O_3 Piezoelectric Ceramics Using Sintering Aids
- 3B02 ゾル・ゲル法による Pb_5Ge_3O_ 添加 PZT セラミックスの低温焼結(その 2)
- 2J07 低温形成 PZT 薄膜の配向制御
- 1B22 金属アルコキシドを用いた ZrO_2-コーティング BaTiO_3 複合粒子の合成と評価
- Preparation and Dielectric Properties of SrBi_2Ta_2O_9 Thin Films by Sol-Gel Method
- B-30. Treatment of Infantile Hydrocephalus,especially Accompanied by the Central Nerbous System Anomaly
- B-17. Measurement of the Intracranial Pressure from the Anterior Fontanelle. : Report 2:Intracranial Pressure Measurement and Analysis of the "Fontanel Puluse"
- Diffusion Barrier Effect of Ultra-Thin Photo-Nitrided a-Si:H Overlayer on SnO_2/Glass Substrate
- Impurity Diffusion Barrier Effect of Ultra-Thin Plasma-Nitrided a-Si:H Overlayer on SnO_2/Glass Substrate
- Electronic Structure of Photochemically Etched Silicon Surfaces : Surfaces, Interfaces and Films
- Band Offset in Boron-Doped Amorphous Silicon Heterostructures : Electrical Properties of Condensed Matter
- Determination of Band Discontinuity in Amorphous Silicon Heterojunctions : Electrical Properties of Condensed Matter
- Laser Heating Dynamics of Poly(methyl methacrylate) Films Doped with Aromatic Molecules as Revealed by Analysis of Diffusion of Triplet States
- Measurements of LET Distribution and Dose Equivalent onboard the Space Shuttle IML-2 (STS-65) and S/MM#4 (STS-79)
- Radiation Dosimetry Measurements with Real Time Radiation Monitoring Device (RRMD)-II in Space Shuttle STS-79
- Measurements of LET Distribution and Dose Equivalent onboard the Space Shuttle IML-2(STS-65)and S/MM#4(STS-79)
- The Irradiation of an Accelerated Heavy ion Beam : Application to the Anti-Arrhythmic Therapy without Massive Myocardial Damage
- Characteristics of clinicopathological and histological findings of superficial depressed type of colorectal submucosal invasive carcinoma, compared with polyp type
- 化学溶液法による(Bi, Nd)_4Ti_3O_ 強誘電体薄膜作製に及ぼすエキシマUV 照射効果
- Film Thickness Dependence of Dielectric Properties of BaTiO_3 Thin Films Prepared by Sol-Gel Method ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Preparation and Properties of Ferroelectric BaTiO_3 Thin Films by Sol-Gel Process
- Effect of PbTiO_3 Seeding Layer on the Growth of Sol-Gel-Derived Pb (Zr_Ti_) O_3 Thin Film
- The Ion Composition in Solar Energetic Particle Events Observed in 1993-1995
- The Relationship between Corotating Energetic Ion Enhancement and Solar Wind Speed at 1AU
- A New Silicon Detector Telescope for Measuring the Linear Energy Transfer Distribution over the Range from 0.2 to 400 keV/μm in Space
- Molecular Recognition of Horse Heart Apomyoglobin to Monopropionate Hemin: Thermodynamic Determination of Two Orientational Isomers by ^1H NMR Spectra
- Variation in Preferred Orientations of TiN Thin Films Prepared by Ion Beam Assisted Deposition
- Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition
- Mechanical Properties of TiN Films with the Preferred Orientations by Nano-Indentation Method
- Presence of Exclusively Bacteriochlorophyll-c Containing Substrain in the Culture of Green Sulfur Photosynthetic Bacterium Chlorobium vibrioforme Strain NCIB 8327 Producing Bacteriochlorophyll-d
- Subarachnoid Hemorrhage Caused by Dural Arteriovenous Fistula of the Sphenobasal Sinus
- Hemimegaloencephaly with Periventricular Heterotopia : Case Report
- Structural Analysis of a Carbon Nitride Film Prepared by Ion-Beam-Assisted Deposition
- Influence of Deposition Temperatures on Bonding State and Microstructure of Carbon Nitride Thin Films Prepared by Ion-Beam-Assisted Deposition
- 5 nm Gate Oxide Grown by Rapid Thermal Processing for Future MOSFETs
- 3P113 Substrate binding excludes water cluster from active site of cytochrome P450cam - mutation analysis of water expelling system(Heme proteins,The 48th Annual Meeting of the Biophysical Society of Japan)
- Control of Surface Reaction on Highly Accurate Low-k Methylsilsesquioxane Etching Process : Nuclear Science, Plasmas, and Electric Discharges
- Magnetic Neutral Loop Discharge (NLD) Plasma and Application to SiO_2 Etching Process
- Dry Etch Process in Magnetic Neutral Loop Discharge Plasma
- Synthesis of Ring-Fluorinated Porphyrins and Reconstitutional Myoglobins with Their Iron Complexes
- Low-Temperature Processing of Highly Oriented Pb(Zr_XTi_)O_3 Thin Film with Multi-Seeding Layers
- Low-Temperature Processing of Ferroelectric Pb(Zr_Ti_)O_3 Thin Film from Molecular-Designed Alkoxide Precursor Solution
- Cerebellopontine Angle Meningioma Causing Asymptomatic Syringomyelia : Case Report
- Preparation and Binding Affinity of New Porphyrin Host Molecule for Ubiquinone Analogues
- 3P-075 基質カンファー結合によるチトクロムP450camの構造変化(ヘム蛋白質,第47回日本生物物理学会年会)
- Sinus Pericranii Associated With Craniosynostosis
- Surgical Program for Craniosynostosis Using Three-Dimensional Solid Model, Combined With Autologous Blood Transfusion in a Japanese Craniofacial Unit
- A Case of Improved Obstructive Sleep Apnea by Distraction Osteogenesis for Midface Hypoplasia of an Infantile Crouzon's Syndrome
- Enhancement of Piezoelectric Properties of Low-Temperature-Fabricated Pb(Mg_Nb_)O_3-PbZrO_3-PbTiO_3 Ceramics with LiBiO_2 Sintering Aid by Post-Annealing Process
- Low-Temperature Sintering of LiBiO2-Coated Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 Powders Prepared by Surface Chemical Modification Method and Their Piezoelectric Properties
- DNA-Binding Hemoproteins Tethering Polyamine Interface
- Postoperative Infection After Duraplasty With Expanded Polytetrafluoroethylene Sheet
- Dilated Fourth Ventricle in Arnold-Chiari Malformation Type II: Isolated Fourth Ventricle as Sequelae of Shunt? : Case Report
- Magnetic Resonance Imaging of Fat Embolism Syndrome : Case Report
- 3P-076 チトクロムP450camの活性部位からの水クラスター排出機構(ヘム蛋白質,第47回日本生物物理学会年会)
- Endarterectomy for Narrowing of the External Carotid Artery in a Patient Who Underwent Extracranial-Intracranial Bypass for Occlusion of the Internal Carotid Artery : Case Report
- Influence of α-tumor necrosis factor and β-interleukin-1 on production of angiogenetic factors and thymidine phosphorylase activity in immortalized human decidual fibroblasts in vitro
- Chemical Processing and Dielectric Properties of Ferroelectric SrBi_2Ta_2O_9 Thin Films
- Sinus Pericranii with Severe Symptom Due to Transient Disorder of Venous Return : Case Report
- Dielectric Properties of Double-Oxide Ceramics in the System Ln_2O_3-TiO_2 (Ln=La, Nd and Sm) : Dielectric Properties
- Preparation of (Ba_xSr_)TiO_3 Particles by Vapor-Phase Hydrolysis of Precursors Formed from Alkoxide-Hydroxide
- Electric-Field-Induced Strain in Lead Lanthanum Zirconate Titanate Ceramics
- Preparation of Superconducting Bi-Sr-Ca-Cu-O Films with Preferred Orientation through a Metal Alkoxide Route
- Processing of Porous 3-3 PZT Ceramics Using Capsule-Free O_2-HIP : Piezoelectrics