Development of An Accurate Optical Proximity Correction System for 1 Gbit Dynamic Random Access Memory Fabrication
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-10-15
著者
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Kobayashi Sota
Silicon Systems Research Laboratories Nec Corporation
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Kotani Toshiya
Microelectronics Laboratory Toshiba Corporation
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Inoue S
Toshiba Corp. Kawasaki Jpn
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Yamamoto K
Kobayasi Institute Of Physical Research
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Kobayashi S
Science University Of Tokyo In Yamaguchi
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Kobayashi Shunsuke
Department Of Electronic Engineering (div. Of Engineering Sciences) Faculty Of Technology Tokyo Univ
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Kobayashi S
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology(aist)
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Inoue Seiji
Mirai Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And T
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Tanaka S
International Superconductivity Technol. Center Tokyo Jpn
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Kotani Tsuyoshi
Fujitsu Laboratories Limited
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TANAKA Satoshi
Advanced LSI Technology Laboratory, Toshiba Corporation
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YAMAMOTO Kazuko
Advanced LSI Technology Laboratory, Toshiba Corporation
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KOBAYASHI Sachiko
Advanced LSI Technology Laboratory, Toshiba Corporation
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UNO Taiga
Advanced LSI Technology Laboratory, Toshiba Corporation
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INOUE Soichi
Microelectronics Laboratory, Toshiba Corporation
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Tanaka Satoshi
Microelectronics Engineering Laboratory, Toshiba Corporations Semiconductor Company
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Higurashi Hitoshi
Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation
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Watanabe Susumu
DA Engineering Department, Micro & Custom LSI Division, Toshiba Corporation Semiconductor Company
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Yano Mitsuhiro
DA Engineering Department, Micro & Custom LSI Division, Toshiba Corporation Semiconductor Company
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Ohki Shinichiro
Toshiba Microelectronics Corporation
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Tsunakawa Kiyoshi
Toshiba Microelectronics Corporation
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Kobayashi Shunsuke
Science University Of Tokyo
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Kobayashi Shunsuke
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology(aist)
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Yamamoto K
Storage Media Systems Development Center Matsushita Elec. Ind. Co. Ltd.
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Kobayashi Shunsuke
Liquid Crystal Institute Science University Of Tokyo In Yamaguchi
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Yano Mitsuhiro
Da Engineering Department Micro & Custom Lsi Division Toshiba Corporation Semiconductor Company
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Kotani Tokumi
Microelectronics Laboratory Toshiba Corporation
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Higurashi Hitoshi
Advanced Lsi Technology Laboratory Corporate Research & Development Center Toshiba Corporation
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Uno T
Kanagawa Inst. Technol. Kanagawa Jpn
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Kobayashi Shun-ichi
Department Of Physics School Of Science University Of Tokyo
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Kotani T
Microelectronics Laboratory Toshiba Corporation
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Yano Makoto
Department Of Electrical Engineering Faculty Of Engineering Ibaraki University
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Kobayashi Shunichi
Department Of Physics Graduate School Of Science The University Of Tokyo
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Watanabe Susumu
Da Engineering Department Micro & Custom Lsi Division Toshiba Corporation Semiconductor Company
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Tanaka Satoshi
Microelectronics Engineering Laboratories Toshiba Corporation
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KOBAYASHI Shun-ichi
Faculty of Engineering Science, Osaka University:(Present address)Department of Physics, University of Tokyo
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Kobayashi Shunichi
Department of Physics, Faculty of Science, University of Tokyo
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