Fabrication of a New Pyroelectric Infrared Sensor Using MgO Surface Micromachining
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-12-30
著者
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Kotani Toshiya
Microelectronics Laboratory Toshiba Corporation
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Kotani Tsuyoshi
Fujitsu Laboratories Limited
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Nomura K
Nagoya Inst. Technol. Nagoya Jpn
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Kotani Tokumi
Microelectronics Laboratory Toshiba Corporation
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KOTANI Tokumi
Corporate Products Development Center, Matsushita Electronic Components Co., Ltd.
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NAKANISHI Tsutomu
Corporate Products Development Center, Matsushita Electronic Components Co., Ltd.
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NOMURA Koji
Corporate Products Development Center, Matsushita Electronic Components Co., Ltd.
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Kotani T
Microelectronics Laboratory Toshiba Corporation
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Nomura Koji
Corporate Products Development Center Matsushita Electronic Components Co. Ltd.
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Nakanishi Tsutomu
Corporate Products Development Center Matsushita Electronic Components Co. Ltd.
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