Simulation Study on Phase-Shifting Masks for Isolated Patterns : Photolithography

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-04-30

著者

• Tanaka Yasuaki

  Ntt Interdisciplinary Research Laboratories

• Tanaka Y

  Tokyo Univ. Agriculture And Technol. Koganei Jpn

• Tanaka Y

  Department Of Materials Science And Technology Science University Of Tokyo

• SATO Toshiro

  Shinshu University

• NAKASE Makoto

  Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation

• Inoue S

  Toshiba Corp. Kawasaki Jpn

• Inoue Seiji

  Mirai Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And T

• TAMAMUSHI Shuichi

  College of General Education, University of Tokyo

• Sato T

  Mitsubishi Chemical Corp. Ibaraki Jpn

• Sato T

  Faculty Of Engineering Niigata University

• INOUE Soichi

  ULSI research Center, Toshiba Corporation

• TANAKA Yoko

  ULSI research Center, Toshiba Corporation

• SATO Takashi

  ULSI research Center, Toshiba Corporation

• TAMAMUSHI Shuichi

  ULSI research Center, Toshiba Corporation

• NAKASE Makoto

  ULSI research Center, Toshiba Corporation

• Inoue Soichi

  Ulsi Research Center Toshiba Corporation

• Nakase M

  Materials And Devices Research Laboratories Research And Development Center Toshiba Corporation

• Nakase Makoto

  Ulsi Research Center Toshiba Corporation:(present Address)chemical Laboratory Research And Developme

• Sato T

  Shinshu University

• Tamamushi Shuichi

  Ulsi Research Center Toshiba Corporation

• Tanaka Yoshihisa

  Department Of Electronics Faculty Of Industrial Arts Kyoto Technical University

関連論文

• Formation of Boron Nitride (BN) Fullerene-Like Nanoparticles and (BN)_xC_y Nanotubes Using Carbon Nanotubes as Templates
• Adsorption Site Determination by Reflection High-Energy Electron Diffraction Combined with Interface Energy Calculation
• Two Dimensional Structure and Growth Mode of Ultrathin Ce Film on a Mo(110) Surface
• FeCoBN Magnetic Thin Film Inductor for MHz Switching Micro DC-DC Converters
• Dissolution Inhibitors for 193-nm Chemically Amplified Resists
• Highty Transparent Chemically Amplified ArF Excimer Laser Resists by Absorption Band Shift for 193 nm Wavelength
• 77 PTPN11 GENE AND NOONAN/LEOPARD SYNDROME, MUTATIONS ANALYSIS AND COMPARISIONS OF THE CLINlCAL FEATURES OF 45 JAPANESE PATIENTS
• Fabrication and Superconducting Properties of AgCu Alloy-Sheathed BiSrCaCuO Oxide Tapes
• In Situ Observations of the Growth Process of C-Axis-Oriented Bi_2Sr_2Ca_1Cu_2O_x Superconducting Phase
• Preparation of YBa_2Cu_3O_y Superconducting Thin Films by Radio-Frequency Plasma Flash Evaporation
• Preparation of YBa_2Cu_3O_y Superconducting Thin Films on Metallic Substrates by Excimer Laser Ablation
• Deposition of YBa_2Cu_3O_y Thin Films on Metallic Substrates by Laser Ablation
• High Critical Current Density in Silver-Sheathed Bi_2Sr_2Ca_1Cu_2Ag_yO_x Tape
• Preparation of High-T_c Y-Ba-Cu-O Films by Three-Target Magnetron Sputtering
• Properties of Pb-Doped Bi-Sr-Ca-Cu-O Superconductors Prepared by the Intermediate Pressing Process
• Improvements in the Current Carrying Capacity in High-T_c BiSrCaCuO Superconductors : Electrical Properties of Condensed Matter
• Preparation of Highly Oriented Microstructure in the (Bi, Pb)-Sr-Ca-Cu-O Sintered Oxide Superconductor : Electrical Properties of Condensed Matter
• New Technique for Preparation of BiSrCaCuO Thin Films with T_c of 100 K and Above : Electrical Properties Condensed Matter
• Sputter Deposition of BiSrCaCuOThin Films : Electrical Properties of Condensed Matter
• Effects of Synthesis Conditions on the Properties of a Superconducting Bi-Sr-Ca-Cu-O System : Electrical Properties of Condensed Matter
• A New High-T_c Oxide Superconductor without a Rare Earth Element : Electrical Properties of Condensed Matter
• Switching Dynamics of Bi_2Sr_2CaCu_2O_ Intrinsic Josephson Junctions : Macroscopic Quantum Tunneling and Self-Heating Effect(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• Dynamics of Picosecond Laser-Generated Acoustic Waves in Solids : Photoacoustic Spectroscopy
• Surface Transformations in Glass Initiated by Laser-Driven Shock : High Power Ultrasonics
• Explosive Crystallization in Amorphous Silicon Induced by Picosecond High-Power Laser Pulses
• Epitaxial Fe_Co_(112) Films Grown on MgO(110) Substrates
• Measurement of Terrace Width Distribution on an Si(110) Surface Using High-Temperature Scanning Tunneling Microscopy
• Observation of Undulator Radiation. : I. Operation Studies and Visual Observation
• Concentration Profiles of Nickel and Chromium Implanted in Mild Steel
• Structure Analysis of the Bi_2(Sr,Ca)_3Cu_2O_ Superconducting Crystal Based on the Computer Simulation of HRTEM Images : Condensed Matter
• Twins and Intergrowth Defects in High-T_c Bi-Sr-Ca-Cu-O Superconductor Examined by High-Resolution Electron Microscopy : Electrical Properties of Condensed Matter
• Possible Model of the Modulated Structure in High-T_c Superconductor in a Bi-Sr-Ca-Cu-O System Revealed by High-Resolution Electron Microscopy : Electrical Properties of Condensed Matter
• High-Resolution Electron Microscopy of Modulated Structure in the New High-T_c superconductors of the Bi-Sr-Ca-Cu-O System : Electrical Properties of Condensed Matter
• Noncontact Ultrasonic Imaging of Subsurface Defects Using a Laser-Ultrasonic Technique
• Effects of Electrode Geometry on Breakdown Voltage of a Single-Gap Pseudospark Discharge
• Synthesis of Bi-Sr-Ca-Cu-O Superconductor by Vacuum Calcination Method : Electrical Properties of Condensed Matter
• Synthesis of Superconductive Oxides by Vacuum Calcination Method : Electrical Properties of Condensed Matter
• Photochemical Polymerization of Dithienothiophenes
• Highly Accurate Process Proximity Correction Based on Empirical Model for 0.18 μm Generation and Beyond
• Development of An Accurate Optical Proximity Correction System for 1 Gbit Dynamic Random Access Memory Fabrication
• Feasibility Study on High Data Transfer Rate of 300 Mbit / s with 8-Beam Laser Diode Array
• Readout Wave form Equalization in Pulse-Width-Modulated Optical Recording : High Density Recording
• Readout Waveform Equalization in Pulse-Width-Modulated Optical Recording
• SEM Observation of Ag Crystallites Growing on Graphite Substrate
• Deposition System for SEM "In Situ" Observation of Growing Crystals and the Preliminary Study of Zn Vapor Deposition
• Thermal Decomposition of Dissolution Inhibitor in Chemically Amplified Resist during Prebake Process
• A Novel Method of Beryllium Window Protection in a Plasma Focus Soft X-Ray Source
• Vibration of Beryllium Foil Window Caused by Plasma Particle Bombardment in Plasma Focus X-Ray Source
• Timing Jitter Reduction in a Passively Mode-Locked Fiber Laser
• Generation of Tunable Pulses below 345 fs Using a Passively Mode-Locked Fiber Ring Laser with Bulk Components
• Simulation Study on Phase-Shifting Masks for Isolated Patterns : Photolithography
• Simulation Study on Phase-Shifting Masks for Isolated Patterns
• Organotin-Containing Resists (TMAR) for X-Ray Lithography : Resist Material and Process
• Organotin-Containing Resists (TMAR) for X-Ray Lithography
• Parametric Studies on the Laser-Diode-Pumped, Thermal-Lensing-Compensated, Mode-Locked, Q-Switched Nd:YAG Laser
• New fullerenes in the B-C-N system: synthesis and analysis by an electron beam
• Compatible Objective Lens for Blu-ray Disc and Degital Versatile Disc Using Diffractive Optical Element and Phase-Step Element which Corrects both Chromatic and Spherical Aberrations
• Lens Design of Compatible Objective Lens for Blu-ray Disc and Digital Versatile Disk with Diffractive Optical Element and Phase Steps
• Inner Area Aberration Compensating Lens for Compact Disc (Compact Disc-Recordable)-Digital Versatile Disc Compatible Head
• Lens Design for Optical Head Compatible with Compact Disk and Digital Versatile Disk
• Dual Focus Optical Head with a Hologram-Integrated Lens
• Effects of Electrode Geometry and Gas Pressure on Breakdown Voltage of a Pseudospark Discharge
• Variations in Fe_3O_4 and CaCO_3 Contents in Deep-Sea Cores from the Western Equatorial Pacific
• Properties of Ag-Sheathed Bi-Pb-Sr-Ca-Cu-O Superconducting Tapes Prepared by the Intermediate Pressing Process
• New Frequency Stabilization Method of a Semiconductor Laser Using the Faraday Effect of the Rb-D_2 Absorption Line
• Nanometer-Scale Lithography on the Oligosilane Langmuir-Blodgett Film
• Anamorphic Focusing Optical System for Laser-Diode-Array
• Photochemical Polymerization of Oligothiophenes
• Frequency Stabilizatiorn of a Semiconductor Laser under Direct Frequency Shift Keying Using the Saturated Absorption Signal
• A Simple Method for Measurement of Wavelength Chirping of a High-Peak-Power Laser Diode Array during Pulsed Operation
• Optimization of a High-Performance Chemically Amplified Positive Resist for Electron-Beam Lithography
• Thermal Contraction of Drawn Polyethylene Film I. An Empirical Equation for Temperature Dependence of Thermal Stress
• Profile-Imaging of Wavy Cleavage Surface of Bi_2Sr_2CaCu_2O_y by High-Resolution Transmission Electron Microscopy
• Contactless Measurement of Carrier Lifetime in Silicon Thick Wafers
• Device Characteristics of Organic Static Induction Transistor Using Copper Phthalocyanine Films and Al Gate Electrode
• Fusible Poly(3-alkylselenophene) and Its Properties
• Diffractive-Refractive Achromatic Lens for Optical Disk System by Glass Molding
• Efficiency Simulation for Diamond-Turned Diffractive Lenses
• Reducing Photocurable Polymer Pattern Shrinkage and Roughness during Dry Etching in Photo-Nanoimprint Lithography
• Uniformity in Patterns Imprinted Using Photo-Curable Liquid Polymer
• Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer
• Bound States in Superconductors
• Main-Field Stitching Accuracy Analysis in Electron Beam Writing Systems
• Involvement of canonical Wnt/Wingless signaling in the determination of the positional values within the leg segment of the cricket Gryllus bimaculatus
• Far-Infrared Reflectance and Transmittance Studies of YBa2Cu3O7-x Single-Crystal Thin Films
• Effect of Coherence Factor σ and Shifter Arrangement for the Levenson-Type Phase-Shifting Mask
• Power Spectral Densities of Temporal Variations of Blood Pressures
• A Soft X-Ray Microscope Using an Imaging Detector
• A 3-Terminal AT-Cut Quartz Resonator with Shield Electrodes
• Preparation and Property of Polytellurophene and Polyselenophene
• Electrochemical Preparation of Polyselenophene and Its Property
• Optical Studies of Resonantly Excited Excitonic Molecules in CuCl
• Picosecond Time Analysis of Excitonic Molecule Luminescence Spectra in CuCl
• Recent Progress in KrF Excimer Laser Lithography (Special Issue on Opto-Electronics and LSI)
• KrF Excimer Laser Process: Lateral and Surface Modification for Enhancing Resist Contrast
• Statistical Analysis on Phototaxis of Goldfish in an Experimental Vessel
• An Interpretation of the Telegraph Equation for Animal Movement near Boundary Wall
• Correspondence of Three Thermal Adaptation Times in Organisms and the Scaling Law
• Thick Bi_2Sr_2CaCu_2O_x Films without Substrates Prepared by Dip-Suspension in Melts
• Reducing Photocurable Polymer Pattern Shrinkage and Roughness during Dry Etching in Photo-Nanoimprint Lithography

もっと見る 閉じる

スポンサーリンク