A Soft X-Ray Microscope Using an Imaging Detector
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概要
- 論文の詳細を見る
An X-ray microscope, consisting of a Wolter-type mirror and an imaging detector, was constructed. The configuration of the mirror was optimized by the ray-tracing procedure. The resolution of the imaging detector was estimated to be better than 1 μm from the spot diagram of the electron lenses. A photocathode made of a CsI layer as a photoemitter and a SIN_x membrane as a support for the CsI layer is presented, The fundamental performance of the X-ray microscope has been evaluated, and its resolution has been estimated to be better than 2 μm.
- 社団法人応用物理学会の論文
- 1990-01-20
著者
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AOKI Sadao
Institute of Applied Physics, University of Tsukuba
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Aoki Sadao
Institute Of Applied Physics University Of Tsukuba
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TAKIGAWA Tadahiro
ULSI research Center, Toshiba Corp.
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INOUE Soichi
ULSI research Center, Toshiba Corporation
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Ogawa Yoji
Ulsi Research Laboratories Research And Development Center Toshiba Corporation
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Ogawa Yoji
Ulsi Research Center Toshiba Corporation
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Inoue Soichi
Ulsi Research Center Toshiba Corporation
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UEDA Katsunobu
Manufacturing Engineering Laboratory, Toshiba Corporation
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SUMIYA Mitsuo
Manufacturing Engineering Laboratory, Toshiba Corporation
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Sumiya Mitsuo
Manufacturing Engineering Laboratory Toshiba Corporation
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Ueda Katsunobu
Manufacturing Engineering Laboratory Toshiba Corporation
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Takigawa Tadahiro
Ulsi Research Center Toshiba Corp
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