Sub-100 nm-Resolution Grazing Incidence Soft X-Ray Microscope with a Laser-Produced Plasma Source

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-10-15

著者

• AOKI Sadao

  Institute of Applied Physics, University of Tsukuba

• Aoki S

  Univ. Tsukuba Ibaraki

• Aoki Sadao

  Institute Of Applied Physics University Of Tsukuba

• Aoki S

  Institute Of Applied Physics University Of Tsukuba

• Ogata Toshihiro

  Department Of Electronic Engineering Faculty Of Science And Engineering Saga University

• Aoki S

  Kyushu Inst. Technology Fukuoka

• Ogata T

  Ulsi Development Center Mitsubishi Electric Corp.

• OGATA Taro

  Institute of Applied Physics, University of Tsukuba

• SUDO Shuuzou

  Seiko Instruments Inc.

• ONUKI Tetsuji

  Nikon Inc.

• Sudo S

  Nec Compound Semiconductor Devices Ltd. Shiga Jpn

• Onuki Tetsuji

  Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology:d

• Saji A

  Chubu Electric Power Co. Nagoya

• Aoki Sadao

  Department Of Pure And Applied Science College Of General Education University Of Tokyo:(present Add

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