Impact of Organic Contaminants from the Environment of Electrical Characteristics of Thin Gate Oxides

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1998-05-01

著者

• Kobayashi K

  Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative

• Ohno Yoshikazu

  Ulsi Laboratory Mitsubishi Electric Corporation

• OGATA Tamotsu

  ULSI Laboratory, Mitsubishi Electric Corporation

• BAN Cozy

  ULSI Laboratory, Mitsubishi Electric Corporation

• UEYAMA Akemi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• MURANAKA Seiji

  ULSI Laboratory, Mitsubishi Electric Corporation

• HAYASHI Tomohiko

  Ryoden Semiconductor System Engineering Corporation

• KOBAYASHI Kiyoteru

  ULSI Laboratory, Mitsubishi Electric Corporation

• KOBAYASHI Junji

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• KUROKAWA Hiroshi

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• HIRAYAMA Makoto

  ULSI Laboratory, Mitsubishi Electric Corporation

• Kobayashi K

  Kobe Steel Ltd. Kobe Jpn

• Kamigaki K

  College Of Liberal Arts Toyama University

• Ogata Toshihiro

  Department Of Electronic Engineering Faculty Of Science And Engineering Saga University

• Kudoh Kazuhide

  Department Of Applied Physics Tokyo University Of Science

• Kurokawa Hisayoshi

  Department Of Electrical And Electronic Engineering Ehime University

• Ogata T

  Ulsi Development Center Mitsubishi Electric Corp.

• Kurokawa Hiroshi

  Advanced Technology R&d Center Mitsubishi Electric Corp

• Ban Cozy

  Ulsi Laboratory Mitsubishi Electric Corporation

• Ueyama Akemi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Muranaka Seiji

  Ulsi Laboratory Mitsubishi Electric Corporation

• Kurokawa H

  Department Of Electrical And Electronic Engineering Ehime University

• Hirayama M

  Ulsi Laboratory Mitsubishi Electric Corporation

• Hirayama Makoto

  Ulsi Laboratory Mitsubishi Electric Corporation

• Kobayashi Junji

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Ogata Tamotsu

  ULSI Development Center, Mitsubishi Electric Corp.

• KOBAYASHI Kiyoteru

  ULSI Laboratory, Evaluation amp Analysis Center, Mitsubishi Electric Corporation

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