Growth of Bi_4Ti_3O_<12> Thin Film by Two-Dimensional RF Magnetron Sputtering with Bi_2O_3 and TiO_2 Targets (Short Note)
スポンサーリンク
概要
- 論文の詳細を見る
Ferroelectric Bi_4Ti_3O_<12> (BIT) thin films were grown on Pt/Ti/SiO_2/Si substrate by a two-dimensional RF magnetron sputtering method. When the RF powers of Bi_2O_3 and TiO_2 were fixed at 100W and 200W, respectively, the BIT film exhibited c-axis orientation. The prepared BIT thin film consisted of well-developed grains and exhibited a good polarization-voltage hysteresis loop. The remanent polarization and coercive field were 4.09μC/cm^2 and E_c = 56.1kV/cm, respectively. The dielectric constant was about 330 and the loss factor was 2.18%. [DOI: 10.1143/JJAP.41.1536]
- 社団法人応用物理学会の論文
- 2002-03-15
著者
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TAGUCHI Munetaka
RIKEN/SPring-8
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樋口 透
東理大理
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TANAKA Masashi
Department of Cardiovascular Surgery, Saitama Medical Center, Jichi Medical University
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Taniguchi Masaki
Grad. Sch. Sci. Hiroshima Univ.:hsrc Hiroshima Univ.
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TSUKAMOTO Takeyo
Department of Applied Physics, Tokyo University of Science
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Kobayashi K
Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative
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Tanaka M
Mitsubishi Electric Co. Ltd. Hyogo Jpn
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Tanaka Michiko
Tokyo University Of Agiculture And Technology Department Of Biotechnology
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HIGUCHI Tohru
Department of Applied Physics, Tokyo University of Science
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Kobayashi K
Kobe Steel Ltd. Kobe Jpn
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Kishio Kohji
Department Of Applied Chemistry University Of Tokyo:sorst Japan Science And Technology Corporation (
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KUDOH Kazuhide
Department of Applied Physics, Tokyo University of Science
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Kudoh Kazuhide
Department Of Applied Physics Tokyo University Of Science
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Tsukamoto Takeyo
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
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Tanaka M
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Tsukamoto T
Department Of Applied Physics Tokyo University Of Science
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Tsukamoto T
Toshiba Corp. Kawasaki Jpn
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Higuchi Tohru
Department Of Applied Physics Faculty Of Science Tokyo Univ. Of Science
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Tanaka Masashi
Department Of Cardiovascular Surgery Saitama Medical Center Jichi Medical University
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Tanaka Masashi
Department Of Cardiology Hamamatsu Rosai Hospital
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Higuchi T
東理大理
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TANAKA Masashi
Department of Biology, Faculty of Science, Tokyo Metropolitan University
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