Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane

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概要

• 論文の詳細を見る
• 2009-01-25

著者

• Kobayashi K

  Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative

• Kanda Kazuhiro

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• Kanda Kazuhiro

  Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins

• MATSUI Shinji

  Graduate School of Science, University of Hyogo

• Haruyama Y

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• Haruyama Yuichi

  Uvsor Facility Institute For Molecular Science:(present Address)laboratory Of Advanced Science And T

• Haruyama Yuichi

  Institute Of Physics University Of Tsukuba

• Haruyama Yuichi

  Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins

• NAKAMATSU Ken-ichiro

  Graduate School of Science, LASTI, Himeji Institute of Technology

• Ishida M

  Sii Nanotechnology Inc.

• Ichikawa Masakazu

  Joint Research Center For Atom Technology

• Ichikawa Masakazu

  Joint Research Center For Atom Technology Angstrom Technology Partnership

• Ichikawa Masakazu

  Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C

• Ichikawa Mitsuru

  Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• Okada Makoto

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• Manaka Susumu

  Fundamental Research Laboratories Nec Corporation

• IWASA Masayuki

  SII Nanotechnology Inc.

• Kanda K

  Himeji Institute Of Technology Graduate School Of Science Lasti

• Matsui Shinji

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• Nakamatsu Kenichiro

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• Nakamatsu Ken-ichiro

  Laboratory Of Advanced Science And Technology For Industry (lasti) Graduate School Of Science Univer

• Matsui Shinji

  Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins

• Nakamatsu Ken-ichiro

  Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo

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