Relationship between Field Emission Properties and Material Characteristics of Diamond-Like Carbon Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
Diamond-like carbon (DLC) deposited by focused-ion-beam chemical vapor deposition (FIB-CVD) contains gallium (Ga) when a Ga ion beam is used. Therefore, DLC deposited by FIB-CVD (FIB-DLC) has specific material characteristics that differ from those of typical DLC. In this study, FIB-DLC’s annealing-temperature dependence of field emission properties, work functions, and surface conditions were measured to understand its material characteristics. The results show that Ga incorporation is required in order to obtain a sufficient electric conductivity for the field emission. Furthermore, we found that the work function is increased by the graphitization of the FIB-DLC surface caused by the annealing treatment.
- 2007-12-15
著者
-
Kanda Kazuhiro
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
-
KAITO Takashi
SII NanoTechnology Inc.
-
Haruyama Yuichi
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
-
Kometani Reo
Graduate School Of Engineering The University Of Tokyo
-
Matsui Shinji
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
-
Kanda Kazuhiro
Graduate School of Science, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
-
Kometani Reo
Graduate School of Science, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
-
Kaito Takashi
SII Nanotechnology Inc., 36-1 Takenoshita, Oyama, Shizuoka 410-1393, Japan
-
Kaito Takashi
SII Nano Technology Inc., 36-1 Takenoshita, Oyama, Shizuoka 410-1393, Japan
-
KAITO Takashi
SII Nano Technology Inc.
関連論文
- Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
- Fabrication of Nanomanipulator with SiO_2/DLC Heterostructure by Focused-Ion-Beam Chemical Vapor Deposition
- Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
- Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications(Micro/Nano Fabrication,Microoptomechatronics)
- E6 Periodic cylindrical nanostructure localization by means of affinity control in diblock copolymer microphase separation(Other manufacturing-related technologies)
- E4 Nanomanufacturing Tool Fabrications by Focused-Ion-Beam Chemical Vapor Deposition(Other manufacturing-related technologies)
- Photoemission study of the Au-SrTiO3(100) surface (特集 量子ビームによるナノバイオ科学と基盤技術)
- X-Ray Photoelectron Spectroscopy Study of Synchrotron Radiation Irradiation of a Polytetrafluoroethylene Surface
- In-situ Observation of the Three-Dimensional Nano-Structure Growth on Focused-Ion-Beam Chemical Vapor Deposition by Scanning Electron Microscope
- Evaluation of Vacuum Microcapsule Fabricated using Focused-Ion-Beam Chemical-Vapor-Deposition
- Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics(Micro/Nano Fabrication,Microoptomechatronics)
- Comparison of Young's Modulus Dependency on Beam Accelerating Voltage between Electron-Beam- and Focused Ion-Beam-Induced Chemical Vapor Deposition Pillars
- Evaluation of Field Electron Emitter Fabricated Using Focused-Ion-Beam Chemical Vapor Deposition
- Nanoimprint Mold Repair by Ga^+ Focused-Ion-Beam Direct Etching
- Synchrotron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline Polyimide
- H205 EVALUATION OF RELATIVE VELOCITY BETWEEN SINGLE BUBBLES AND LIQUID IN HORIZONTAL TURBULENT PIPE FLOW(Bubble behavior)
- Surface Morphology of Diamond-Like Carbon Film and Si Wafer Milled with 30 keV Gallium Focused Ion Beam
- Deposition Yield and Physical Properties of Carbon Films Deposited by Focused-Ion-Beam Chemical Vapor Deposition
- Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
- Nanostructure Analysis of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
- Photoelectron Spectroscopy Study of the Valence Band Region in Diamond-Like Carbon Thin Films
- Elastic Double Structure of Amorphous Carbon Pillar Grown by Focused-Ion-Beam Chemical Vapor Deposition
- Control of the Molecularly Reoriented Direction in Surface Relief Holographic Gratings Using Photoreactive Liquid Crystalline Copolymers
- Thermal Nanoimprinting on Prealigned Photoreactive Polymer Liquid Crystal for Molecular Reorientation
- Surface Relief Formation in Photo-Cross-Linkable Polymer/Benzophenone Composite Films Using 325 nm Laser
- Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition
- Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy
- Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
- Eduction Position Control of Incorporated Gallium in Diamond-Like Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition
- Relationship between Field Emission Properties and Material Characteristics of Diamond-Like Carbon Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
- Evaluation of a Bio Nano-Sensing Probe Fabricated by Focused-Ion-Beam Chemical Vapor Deposition for Single Organelle Analyses
- Nanoimprint Mold Repair by Ga+ Focused-Ion-Beam Direct Etching
- Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
- Nanoporous Structure Fabrication in Selective Areas by Block Copolymer Self-Assembly and Electron Beam Lithography
- X-ray Photoelectron Spectroscopy Study of Diamond-Like Carbon Thin Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition
- Impact of Resist Shrinkage and Its Correction in Nanoimprint Lithography
- Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane
- Synchrotron Radiation Effect in the Soft X-ray Region on the Surface Properties of Pyromellitic Dianhydride-Oxydianline Polyimide
- Surface Modification of Diamond-like Carbon by Synchrotron Radiation Exposure under the Perfluorohexane Gas Atmosphere
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Superconductivity in Tungsten-Carbide Nanowires Deposited from the Mixtures of W(CO)
- Photoemission Study of Hydrogenated Amorphous Carbon Thin Films as a Function of Annealing Temperature
- Angle-Dependent Measurement of Near Edge X-ray Absorption Fine Structure of Annealing Effect on Local Structure of Focused-Ion-Beam Chemical Vapor Deposition Diamond-Like Carbon
- Surface Evaluation of Fluorinated Diamond-Like Carbon Thin Film as an Antisticking Layer of Nanoimprint Mold
- X-Ray Photoelectron Spectroscopy Study of Synchrotron Radiation Irradiation of a Polytetrafluoroethylene Surface