Nanoimprint Mold Repair by Ga^+ Focused-Ion-Beam Direct Etching
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-11-15
著者
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Kanda Kazuhiro
University Of Hyogo Laboratory Of Advanced Science And Technology For Industry
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HARUYAMA Yuichi
University of Hyogo, Graduate School of Science, LASTI
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KAITO Takashi
SII NanoTechnology Inc.
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MATSUI Shinji
University of Hyogo, Graduate School of Science, LASTI
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WATANABE Keiichiro
University of Hyogo, Graduate School of Science, LASTI
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Haruyama Y
Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer
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Haruyama Yuichi
Uvsor Facility Institute For Molecular Science:(present Address)laboratory Of Advanced Science And T
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