Deposition of Mechanically Hard Amorphous Carbon Nitride Films with High [N]/([N] + [C]) Ratio
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
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Ito Hiroki
Depatment Of Materials Sci. And Technol. Nagaoka Univ. Of Technol.
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Namiki K
Department Of Chemistry Nagaoka University Of Technology
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Saitoh Hidetoshi
Crest Japan Science And Technology Agency
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SAITOH Hidetoshi
Department of Chemistry, Nagaoka University of Technology
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Ito Haruhiko
Department Of Physics Faculty Of Science Kyoto University
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Kanda Kazuhiro
University Of Hyogo Laboratory Of Advanced Science And Technology For Industry
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HORI Kenzo
Department of Chemistry, Nagaoka University of Technology
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NAMIKI Kei-ichi
Department of Chemistry, Nagaoka University of Technology
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斉藤 博
Department Of Material Science And Technology Nagaoka University Of Technology
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Hori Kenzo
Department Of Chemistry Nagaoka University Of Technology
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