Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
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概要
- 論文の詳細を見る
UV-nanoimprint lithography (NIL) has the potentiality to enable fabrication of nanostructures with high-throughput and low cost. The template is a key element in UV-NIL. Template patterns are directly transferred into the replicated materials. A repair technique is indispensable for UV-NIL template fabrication. However, only a few reports have appeared on the repair of UV-NIL templates. In this study, program protrusion and hollow defects on UV-NIL templates have been repaired by focused-ion-beam (FIB) etching and SiOx chemical vapor deposition (CVD) using tetraethoxysilane as a source gas. The imprinted line patterns were successfully replicated by UV-NIL using the repaired templates. Moreover, it has been confirmed that FIB etching and CVD can be applied to repair 30-nm defects on quartz templates.
- 2008-06-25
著者
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Kanda Kazuhiro
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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KOMETANI Reo
University of Hyogo, Graduate School of Science, LASTI
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KAITO Takashi
SII NanoTechnology Inc.
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Haruyama Yuichi
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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NAKAMATSU Ken-ichiro
Graduate School of Science, LASTI, Himeji Institute of Technology
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Okada Makoto
Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer
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Matsui Shinji
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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Haruyama Yuichi
Graduate School of Science, LASTI, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kometani Reo
University of Tokyo, 1-3-7 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Kaito Takashi
SII Nano Technology Inc., 36-1 Takenoshita, Oyama, Shizuoka 410-1393, Japan
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Nakamatsu Ken-ichiro
Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo
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Nakamatsu Ken-ichiro
Graduate School of Science, LASTI, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kanda Kazuhiro
Graduate School of Science, LASTI, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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