Evaluation of fluorinated diamond like carbon as antisticking layer by scanning probe microscopy

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概要

• 論文の詳細を見る
• Technical Association of Photopolymers, Japanの論文

著者

• Ishida M

  Sii Nanotechnology Inc.

• Ichikawa Masakazu

  Joint Research Center For Atom Technology

• Ichikawa Masakazu

  Joint Research Center For Atom Technology Angstrom Technology Partnership

• Ichikawa Masakazu

  Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C

• Ichikawa Mitsuru

  Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• Okada Makoto

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• IWASA Masayuki

  SII Nanotechnology Inc.

• Nakamatsu Kenichiro

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• Nakamatsu Ken-ichiro

  Laboratory Of Advanced Science And Technology For Industry (lasti) Graduate School Of Science Univer

• Iwasa Masayuki

  Sii Nanotechnology Inc. Tokyo Jpn

• Okada Makoto

  Univ. Hyogo Hyogo Jpn

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