Characterization of nanoimprint resin and antisticking layer by scanning probe microscopy

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概要

• 論文の詳細を見る
• Technical Association of Photopolymers, Japanの論文

著者

• Okada Makoto

  Jst‐crest Tokyo Jpn

• Nakamatsu Ken-ichiro

  Laboratory Of Advanced Science And Technology For Industry (lasti) Graduate School Of Science Univer

• Kang Yuji

  Jst‐crest Tokyo Jpn

• Okada Makoto

  Univ. Hyogo Hyogo Jpn

関連論文

• Effect of UV Irradiation on Microlens Arrays Fabricated by Room Temperature Nanoimprinting Using Organic Spin-on-Glass
• Evaluation of fluorinated diamond like carbon as antisticking layer by scanning probe microscopy
• Fabrication of High-Aspect Si Structures by Deep Reactive Ion Etching Using Hydrogen Silsesquioxane Masks Replicated by Room Temperature Nanoimprinting
• Room-temperature nanoimprint using sol-gel ITO film
• Characterization of nanoimprint resin and antisticking layer by scanning probe microscopy
• Fabrication of Fine Electron Biprism Filament by Free-Space-Nanowiring Technique of Focused-Ion-Beam + Chemical Vapor Deposition for Accurate Off-Axis Electron Holography
• Fabrication of Organic Spin-on-Glass Microring Resonator with a Narrow Gap between a Microring Resonator and a Waveguide Using Nanoimprint Lithography

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