Fabrication of Organic Spin-on-Glass Microring Resonator with a Narrow Gap between a Microring Resonator and a Waveguide Using Nanoimprint Lithography
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概要
- 論文の詳細を見る
A microring resonator with a narrow gap between a waveguide and a microring resonator has been fabricated by using nanoimprint lithography. An organic spin-on-glass has been used as the material for the microring resonator. The outer diameter of the microring resonator is 20 μm and the coupling gap between the straight waveguide and the microring resonator is 40 nm. The filtering characteristics of the microring resonator have been evaluated using a metal halide lamp. The free spectral range is 3.9 nm and the $Q$-factor is 310. The structure of the microring resonator with a narrow gap can be used as a fundamental component of optical devices.
- 2010-07-25
著者
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Fukui Masuo
Department Of Electrical And Electronic Engineering Faculty Of Engineering The University Of Tokushi
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Yamaguchi Kenzo
Department Of Optical Science And Technology Faculty Of Engineering University Of Tokushima
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Nakamatsu Ken-ichiro
Laboratory Of Advanced Science And Technology For Industry (lasti) Graduate School Of Science Univer
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Haraguchi Masanobu
Department Of Electrical And Electronic Engineering Faculty Of Engineering The University Of Tokushi
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Okamoto Toshihiro
Department Of Chemistry The University Of Tokyo
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Okamoto Hiroyuki
Department Of Agricultural Chemistry Kyoto University
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Matsui Shinji
Laboratory Of Advanced Science And Technolgy For Industory Himeji Institute Of Technology
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Sogabe Hidenori
Department of Optical Science and Technology, Faculty of Engineering, The University of Tokushima, 2-1 Minamijosanjima, Tokushima 770-8506, Japan
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Yamaguchi Kenzo
Department of Advanced Materials Science, Faculty of Engineering, Kagawa University, Takamatsu 761-0396, Japan
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Yamaguchi Kenzo
Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 441-8580, Japan
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Nakamatsu Ken-ichiro
Laboratory of Advanced Science and Technology for Industry (LASTI), Graduate School of Science, University of Hyogo, 3-1-2 Koto, Kamigori, Hyogo 678-1205, Japan
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Okamoto Toshihiro
Department of Advanced Electron Devices, The Institute of Scientific and Industrial Research (ISIR), Osaka University, Ibaraki, Osaka 567-0047, Japan
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Okamoto Hiroyuki
Department of Systems and Control Enginnering, Anan National College of Technology, 265 Aoki Minobayashi, Anan, Tokushima 774-017, Japan
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