Evaluation of Surface Roughness Parameters of Metal Films by Light Scattering Technique
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概要
- 論文の詳細を見る
Light scattering is a powerful method to evaluate surface n'oughness parameters.From the information on radiation produced by the: surface roughness we are able toget a pair of roughness paramc:ter, i.e. the amplitude of surface corrugation and thetransverse correlation length. llowever, the parameters evaluated by such a way cannot explain the whole angular distribution of scattc:red light intensity. We show thatthe angular distribution of scattered light intensit3z can be properly explained by acombination of several paramc:ters.
- 社団法人日本物理学会の論文
- 1989-12-15
著者
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Naoi Yoshiki
Department Of Electrical And Electronic Engineering The University Of Tokushima
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Fukui Masuo
Department Of Electrical And Electronic Engineering Faculty Of Engineering The University Of Tokushi
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Naoi Y
Univ. Tokushima Tokushima‐shi Jpn
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