Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-10-15

著者

• Kometani Reo

  Univ. Tokyoi Tokyo Jpn

• Hoshino Takayuki

  Crest Japan Science And Technology Co. (jst)

• KONDO Kazushige

  CREST JST, Japan Science and Technology Co.

• KAITO Takashi

  SII NanoTechnology Inc.

• FUJITA Jun-ichi

  CREST JST, Japan Science and Technology Co.

• ISHIDA Masahiko

  CREST JST, Japan Science and Technology Co.

• OCHIAI Yukinori

  CREST JST, Japan Science and Technology Co.

• KOMETANI Reo

  Himeji Institute of Technology, Graduate School of Science, LASTI

• KANDA Kazuhiro

  Himeji Institute of Technology, Graduate School of Science, LASTI

• HARUYAMA Yuichi

  Himeji Institute of Technology, Graduate School of Science, LASTI

• MATSUI Shinji

  Himeji Institute of Technology, Graduate School of Science, LASTI

• Haruyama Y

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• Haruyama Yuichi

  Uvsor Facility Institute For Molecular Science:(present Address)laboratory Of Advanced Science And T

• Ichikawa Masakazu

  Joint Research Center For Atom Technology

• Ichikawa Masakazu

  Joint Research Center For Atom Technology Angstrom Technology Partnership (jrcat-atp) C

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