Characteristics of Nano-Electrostatic Actuator Fabricated by Focused Ion Beam Chemical Vapor Deposition
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概要
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The three-dimensional (3D) nanostructure fabrication technology using focused ion beam chemical vapor deposition (FIB-CVD) is very effective for highly efficient 3D nanomechanical device fabrication. We can fabricate 3D nanostructure easily and freely with this fabrication technology using FIB-CVD. Here, we demonstrate the fabrication of various 3-D nano-electrostatic actuators and manipulators on a glass capillary by 30 keV Ga+ focused-ion-beam-assisted deposition with phenanthrene vapor as a precursor, and the operation of these actuators and manipulators by applying voltage onto a Au-coated glass capillary under an optical microscope is shown. Furthermore, the structural characteristics and functionalities of them are described in this paper.
- 2004-10-15
著者
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Hoshino Takayuki
Crest Japan Science And Technology Co. (jst)
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KONDO Kazushige
CREST JST, Japan Science and Technology Co.
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KAITO Takashi
SII NanoTechnology Inc.
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FUJITA Jun-ichi
CREST JST, Japan Science and Technology Co.
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ISHIDA Masahiko
CREST JST, Japan Science and Technology Co.
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OCHIAI Yukinori
CREST JST, Japan Science and Technology Co.
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KOMETANI Reo
Himeji Institute of Technology, Graduate School of Science, LASTI
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KANDA Kazuhiro
Himeji Institute of Technology, Graduate School of Science, LASTI
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HARUYAMA Yuichi
Himeji Institute of Technology, Graduate School of Science, LASTI
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MATSUI Shinji
Himeji Institute of Technology, Graduate School of Science, LASTI
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Haruyama Yuichi
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kometani Reo
Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Fujita Jun-ichi
CREST JST, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
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Fujita Jun-ichi
CREST, Japan Science and Technology Co. (JST), Kawaguchi Center Bldg., 4-1-8 Hon-cho, Kawaguchi, Saitama 332-0012, Japan
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Ishida Masahiko
CREST JST, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan
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Kaito Takashi
SII Nano Technology Inc., 36-1 Takenoshita, Oyama, Shizuoka 410-1393, Japan
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KAITO Takashi
SII Nano Technology Inc.
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Kondo Kazushige
CREST, Japan Science and Technology Co. (JST), Kawaguchi Center Bldg., 4-1-8 Hon-cho, Kawaguchi, Saitama 332-0012, Japan
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