Imprint Characteristics by Photo-Induced Solidification of Liquid Polymer
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-12-30
著者
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Hiroshima H
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Inoue S
Toshiba Corp. Kawasaki Jpn
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MATSUI Shinji
Himeji Institute of Technology, Graduate School of Science, LASTI
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Inoue Seiji
Mirai Advanced Semiconductor Research Center National Institute Of Advanced Industrial Science And T
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KOMURO Masanori
Electrotechnical Laboratory
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HIROSHIMA Hiroshi
Electrotechnical Laboratory
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Manaka Susumu
Fundamental Research Laboratories Nec Corporation
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Komuro M
Mirai Advanced Semiconductor Research Center (asrc) National Institute Of Advanced Industrial Scienc
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Tokano Yuji
Department Of Applied Electronics Tokyo Science University
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TANIGUCHI Jun
Science University of Tokyo
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INOUE Seiji
Science University of Tokyo
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KIMURA Naoya
Science University of Tokyo
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TOKANO Yuji
Science University of Tokyo
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Taniguchi J
Department Of Applied Electronics Tokyo University Of Science
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