Novel Process for Visible Light Emission from Si Prepared by Ion Irradiation
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概要
- 論文の詳細を見る
A novel process for visible light emission from Si has been successfully developed. The sample was irradiated with argon or chlorine in an ECR (electron cyclotron resonance) etching apparatus. After etching, the sample was placed in HF solution for 30 minutes. Visible light emission from the sample has been confirmed at a peak wavelength of 700 nm. Various characterizations have been performed, such as SEM and TEM observations, X-ray diffraction and FTIR spectroscopy. Anodized porous silicon is also characterized for comparison.
- 社団法人応用物理学会の論文
- 1992-05-01
著者
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OCHIAI Yukinori
Fundamental Res. Labs., NEC Corporation
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MATSUI Shinji
Fundamental Res. Labs., NEC Corporation
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WATANABE Hideyuki
Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST)
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Watanabe Hirohito
Institute Of Material Science University Of Tsukuba
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Watanabe H
Diamond Research Center National Institute Of Advanced Industrial Science And Technology (aist)
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Watanabe H
Semiconductor Leading Edge Technol. Inc. Yokohama Jpn
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ICHIHASHI Toshinari
NEC Fundamental Research Laboratories
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Mochizuki Yasunori
Fundamental Research Laboratories Nec Corporation
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Mochizuki Yasunori
Fundamental Research Laboratories Nec Coeporation
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WATANABE Heiji
Fundamental Research Laboratories, NEC Corporation
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Ono Haruhiko
Microelectronics Research Laboratories Nec Corporation
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Manaka Susumu
Fundamental Research Laboratories Nec Corporation
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Watanabe Heiji
Fundamental Research Laboratories Nec Corporation
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ICHIHASHI Toshinari
Fundamental Research Laboratories, NEC Corporation
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Ookubo N
Nec Corp. Kanagawa Jpn
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KIMURA Shigeru
Microelectronics Research Laboratories, NEC Corporation
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OOKUBO Norio
Fundamental Research Laboratories, NEC Corporation
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Ichihashi T
Nec Fundamental Research Laboratories
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Kimura Shigeru
Microelectronics Research Laboratories Nec Corporation
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Ichihashi Toshinari
Fundamental Research Laboratories Nec Corporation
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Ichihashi Toshinari
Fundamental and Environmental Research Laboratories, NEC Corporation, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan
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