Fabrication of Y-Cu Liquid Metal Ion Sources : Techniques, Instrumentations and Measurement
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概要
- 論文の詳細を見る
Y-Cu liquid metal ion source (LMIS) has been successfully fabricated using Y_<67>-Cu<33> (atomic%) alloy, which has a 760゜C eutectic point. Tip materials used as needle and heater are W and Ta. It was observed that Cu^+ and Y^+ were dominant ion species emitted from this LMIS. Ion beam current stability and lifetime were better when Ta was used as a tip material than when W was used. It was observed that the liquid metal ion source lifetime was over 20 h.
- 社団法人応用物理学会の論文
- 1988-03-20
著者
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OCHIAI Yukinori
Fundamental Res. Labs., NEC Corporation
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MATSUI Shinji
Fundamental Res. Labs., NEC Corporation
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Manaka Susumu
Fundamental Research Laboratories Nec Corporation
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Matsui S
Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer
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Kojima Y
Nagoya Univ. Nagoya Jpn
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Kojima Yoshikatsu
Fundamental Research Labs. Nec Corporation
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