Superconducting Lines Fabricated from Epitaxial Y-Ba-Cu-O Films : High Temperature Superconducting Thin-Films(<Special Section>Solid State Devices and Materials 1)
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概要
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High-T_c superconducting lines as narrow as 0.8 μm, have been fabricated from Y-Ba-Cu-O films. The films were epitaxially grown on MgO (100) substrates heated at 740℃, by rf magnetron sputtering. The lines were patterned using focused ion-beam lithography and ion-beam etching. The resulting superconducting lines, 1.3 μm wide and 2 mm long, showed a zero resistance temperature of 81 K and a critical current density of 1.5×10^4 A/cm^2 at 77.3 K with smooth surfaces.
- 社団法人応用物理学会の論文
- 1988-11-20
著者
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MATSUI Shinji
Fundamental Res. Labs., NEC Corporation
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Tsuge Hisanao
Microelectronics Research Labs. Nec Corporation
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MATSUKURA Noritsugu
Microelectronics Research Labs., NEC Corporation
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KOJIMA Yoshikatsu
Fundamental Research Labs., NEC Corporation
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WADA Yoshifusa
Microelectronics Research Labs., NEC Corporation
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Kojima Yoshikatsu
Fundamental Research Labs. Nec Corporation
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Wada Yoshifusa
Microelectronics Research Labs. Nec Corporation
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Matsukura Noritsugu
Microelectronics Research Labs. Nec Corporation
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Matsui Shinji
Fundamental Research Labs. Nec Corporation
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