Measurement of Sidewall Roughness by Scanning Tunneling Microscope : Inspection and Testing

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-04-30

著者

• Sato Akinobu

  Functional Devices Research Laboratories Nec Corporation

• MATSUI Shinji

  Fundamental Res. Labs., NEC Corporation

• Sato A

  Nagaoka Univ. Technol. Niigata Jpn

• Sato Akira

  Optical Technology Division, Minolta Co., Ltd.

• Sato A

  National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn

• BABA Masakazu

  Fundamental Research Laboratories, NEC Corporation

• Baba M

  Institute For Solid State Physics University Of Tokyo

• Baba Masakazu

  Fundamental Research Laboratories Nec Corporation

• Baba Masakazu

  Ntt Information And Communication Systems Laboratories

• Matsui S

  Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer

• Sato A

  Takatsuka Laboratory Minolta Co.

• TSUKAMOTO Yuji

  Functional Devices Research Laboratories, NEC Corporation

• Tsukamoto Y

  Nec Corp. Kanagawa Jpn

• Tsukamoto Yuji

  Functional Devices Research Laboratories Nec Corporation

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