Study on Chlorine Adsorbed Silicon Surface Using Soft-X-Ray Photoemission Spectroscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-06-30
著者
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Matsuo Jiro
Fujitsu Laboratories
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Matsuo Jiro
Fujitsu Laboratories Ltd.
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Sato A
Nagaoka Univ. Technol. Niigata Jpn
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Sato Akira
Optical Technology Division, Minolta Co., Ltd.
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Sato A
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Karahashi K
Fujitsu Lab. Atsugi
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Karahashi Kazuhiro
Fujitsu Laboratories
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Sato A
Takatsuka Laboratory Minolta Co.
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SATO Akira
Fujitsu Laboratories Ltd.
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HIJIYA Shinpei
Fujitsu Laboratories Ltd.
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