Antimony Aperture Properties on Super-Resolution Near-Field Structure using Different Protection Layers

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概要

• 論文の詳細を見る

• Modifying a rewritable digital versatile disc (DVD) structure by Sb and SiN thin films, near-field super-resolution was performed beyond the optical diffraction limit only using a current DVD optical pickup. Using the wavelength (λ) of 635 nm and the lens numerical aperture (NA) of 0.6, a mark size of 60 nm was recorded and detected at the double rotation speed of Compact Disc. The super-resolution properties of Sb thin films sandwiched by different dielectric layers of SiO2 and ZnS–SiO2 instead of SiN were also investigated. Super-resolution did not occur and the resolution was close to 200 nm, when using the ZnS–SiO2 layers.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1999-07-15

著者

• Tominaga Junji

  Advanced Optical Memory Group National Institute For Advanced Interdisciplinary Research

• Atoda Nobufumi

  Advanced Optical Memory Group National Institute For Advanced Interdisciplinary Research

• Fuji Hiroshi

  AVC Research Laboratory, Sharp Corp.

• Sato Akira

  Optical Technology Division, Minolta Co., Ltd.

• Fukaya Toshio

  Special Department for COE Projet, National Institute of Materials and Chemical Research

• Nakano Takashi

  Advanced Optical Memory Group, National Institute for Advanced Interdisciplinary Research (NAIR), 1-1-4 Higashi, Tsukuba 305-8562, Japan

• Atoda Nobufumi

  Advanced Optical Memory Group, National Institute for Advanced Interdisciplinary

• Fuji Hiroshi

  AVC Research Laboratory, Sharp Corp., 2613-1, Ichinomoto-cho, Tenri, Nara 632-8567, Japan

• Fukaya Toshio

  Special Department for COE Project, National Institute of Materals and Chemical Research, 1-1 Higashi,

• Nakano Takashi

  Advanced Optical Memory Group, NAIR, MITI

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