YBa_2Cu_3O_y Superconducting Thin Film Obtained by Laser Annealing : Electrical Properties of Condensed Matter
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概要
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A rapid and low-temperature process to obtain YBa_2Cu_3O_y superconducting thin film was studied using a laser annealing technique. As-deposited thin film prepared by ion beam sputtering was converted into the superconductive film using argon laser beam processing, where melting, quenching to 400℃ and annealing at 400℃ in air were carried out. The onset critical temperature was 80 K and the end-point critical temperature was 60 K. Structure, composition and surface morphology were studied by X-ray diffraction, electron probe micro-analysis and scanning electron microscope.
- 社団法人応用物理学会の論文
- 1988-02-20
著者
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FUJITA Jun-ichi
Fundamental Res. Labs., NEC Corporation
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MATSUI Shinji
Fundamental Res. Labs., NEC Corporation
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Fujita Jun-ichi
Fundamental Research Laboratories Nec Corporation
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Aizaki Naoaki
Fundamental Research Laboratories Nec Corporation
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TERASHIMA Koichi
Fundamental Research Laboratories, NEC Corporation
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Terashima Koichi
Fundamental Research Laboratories Nec Corporation
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