Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics(Micro/Nano Fabrication,<Special Section>Microoptomechatronics)
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概要
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Our investigation of diamond-like carbon (DLC) nanosprings with a 130nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000℃ in vacuum. The stiffness was decreased to approximately half of the stiffness of the nanospring without annealing.
- 2007-01-01
著者
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Nagase Masao
Ntt Basic Research Laboratories
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Kobayashi K
Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative
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Kanda Kazuhiro
Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer
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Kanda Kazuhiro
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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KAITO Takashi
SII NanoTechnology Inc.
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MATSUI Shinji
Graduate School of Science, University of Hyogo
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Haruyama Y
Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer
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Haruyama Yuichi
Uvsor Facility Institute For Molecular Science:(present Address)laboratory Of Advanced Science And T
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Haruyama Yuichi
Institute Of Physics University Of Tsukuba
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Haruyama Yuichi
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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KAITO Takashi
Seiko Instruments Inc.
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NAKAMATSU Kenichiro
Graduate School of Science, University of Hyogo
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ICHIHASHI Toshinari
NEC Fundamental Research Laboratories
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Manaka Susumu
Fundamental Research Laboratories Nec Corporation
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Kanda K
Himeji Institute Of Technology Graduate School Of Science Lasti
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Matsui Shinji
Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer
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Nakamatsu Kenichiro
Graduate School Of Science Laboratory Of Advanced Science And Technology For Industry (lasti) Univer
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Nakamatsu Ken-ichiro
Laboratory Of Advanced Science And Technology For Industry (lasti) Graduate School Of Science Univer
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Matsui Shinji
Graduate School Of Science And Laboratory Of Advanced Science And Technology For Industry Himeji Ins
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Ichihashi T
Nec Fundamental Research Laboratories
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Kaito Takashi
SII Nano Technology Inc., 36-1 Takenoshita, Oyama, Shizuoka 410-1393, Japan
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KAITO Takashi
SII Nano Technology Inc.
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