A Spin-Polarized Scanning Electron Microscope with 5-nm Resolution : Instrumentation, Measurement, and Fabrication Technology
スポンサーリンク
概要
- 論文の詳細を見る
For studying sub-10-nm-scale magnetic structures, a high-resolution spin-polarized scanning electron microscope (spin SEM) was developed. It has a specially designed, compact secondary-electron collector that produces a finer probe beam than that of a conventional spin SEM. By observing a narrow magnetic domain wall of SmC05, the developed spin SEM was shown to have a high resolution of 5 nm.
- 社団法人応用物理学会の論文
- 2001-11-15
著者
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Nagase Masao
Ntt Basic Research Laboratories
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YAMAZAKI Kenji
NTT Basic Research Laboratories
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NAMATSU Hideo
NTT Basic Research Laboratories
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Kohashi Teruo
Joint Research Center For Atom Technology (jrcat)-angstrom Technology Partnership (atp)
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KOIKE Kazuyuki
Central Research Laboratory, Hitachi Ltd.
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Koike Kazuyuki
Central Research Laboratory Hitachi Ltd:joint Research Center For Atom Technology (jrcat) National I
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Koike Kazuyuki
Central Research Laboratory Hitachi Ltd.
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Kohashi Teruo
Joint Research Center for Atom Technology (JRCAT), Angstrom Technology Partnership (ATP), 1-1-1 Higashi, Tsukuba, Ibaraki 305-0046, Japan
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