Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy
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概要
- 論文の詳細を見る
A method for evaluating the dynamic characteristics of micro- and nanoresonators with high spatial resolution is proposed. The mechanical resonance of circular micromembrane resonators is directly induced by voltage applied from the microprobe of a scanning probe microscopy (SPM) system. The vibration amplitude is simultaneously detected as height information by SPM. Experimentally, the resonant properties of fundamental and higher-order modes of 200-nm-thick GaAs micromembranes were measured. The frequency of the highest mode is 3.4 MHz and its resonant amplitude is about 1 nm. The resonant amplitude increases with increasing actuation voltage in a linear manner at voltages below 180 mV. Large actuation voltage induces nonlinear vibration with the spring soften effect, which originates from the strong attractive force induced by the electronic field between the probe and membrane. The high tapping force, which is repulsive, induces another type of nonlinear vibration caused by the spring harden effect. The simultaneous actuation and detection for mechanical resonators based on SPM technology reveals the characteristics of the mechanical interaction force between the micromembrane and microprobe.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-06-25
著者
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Nagase Masao
Ntt Basic Research Laboratories
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YAMAGUCHI Hiroshi
NTT Basic Research Laboratories
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Tamaru Kojiro
NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Nonaka Keiichiro
NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Nonaka Keiichiro
NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
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Ishihara Sunao
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, Tokyo 113-8654, Japan
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Ishihara Sunao
Department of Engineering Synthesis, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan
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Warisawa Shin'ichi
Department of Engineering Synthesis, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan
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