Carbon Multiprobes with Nanosprings Integrated on Si Cantilever Using Focused-Ion-Beam Technology

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概要

• 論文の詳細を見る

• A new multiprobe system for scanning probe microscopy for electrical property measurements has been developed. Four carbon probes with nanosprings have been grown using focused-ion-beam chemical vapor deposition (FIB-CVD) on a Si cantilever with Al electrodes. The diameter of the carbon probe is 110 nm, and the diameter of the nanospring is 380 nm. The total height of the probe with the nanospring is approximately 10 μm. The stiffness of the probe is sufficiently high for imaging in the contact mode. The nanosprings compensate for the height differences between the four probes. It is confirmed that electrical contacts between a conductive sample and all four probes are established. This is the first report on a FIB-CVD probe with a nanospring actually operating as a nano-electromechanical system.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-07-15

著者

• Nagase Masao

  Ntt Basic Research Laboratories

• NAMATSU Hideo

  NTT Basic Research Laboratories

• NAKAMATSU Kenichiro

  Univ. of Hyogo, Graduate School of Science, LASTI

• Matsui Shinji

  Univ. Hyogo Hyogo Jpn

• Matsui Shinji

  Univ. of Hyogo, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan

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