Electrodeposition of Water-Repellent Organic Dielectric Film as an Anti-Sticking Coating on Microelectromechanical System Devices
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概要
- 論文の詳細を見る
In this paper, we propose a technique of preventing both wet-release-related and in-use sticking of actuators in microelectromechanical system (MEMS) devices. The technique involves the electrodeposition of a water-repellent organic dielectric film that renders the microstructure surface inactive towards the water used for rinsing. The source material is a core/shell emulsion, which consists of sulfonium cations with epoxy groups containing water-repellent silicone polymers. Applying this technique to the encapsulation of a microstructure confirms its effectiveness in preventing both release-related sticking and in-use sticking of a MEMS structure.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-09-30
著者
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Nagase Masao
Ntt Basic Research Laboratories
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SAKATA Tomomi
NTT Microsystem Integration Laboratories
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SHIMAMURA Toshishige
NTT Microsystem Integration Laboratories
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ISHII Hiromu
NTT Microsystem Integration Laboratories
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KUDOU Kazuhisa
NTT Advanced Technology Corp.
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MACHIDA Katsuyuki
NTT Advanced Technology Corporation
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Shimoyama Nobuhiro
Ntt Microsystem Integration Laboratories
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Sato Norio
Ntt Microsystem Integration Lab. Kanagawa Jpn
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Kuwabara Kei
Ntt Microsystem Integration Laboratories Ntt Corporation
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Shimoyama Nobuhiro
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Kuwabara Kei
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Sato Norio
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Ishii Hiromu
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Shimamura Toshishige
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Machida Katsuyuki
NTT Advanced Technology Corp.
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Machida Katsuyuki
NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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Sakata Tomomi
NTT Microsystem Integration Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
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