KUDOU Kazuhisa | NTT Advanced Technology Corp.
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概要
関連著者
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KUDOU Kazuhisa
NTT Advanced Technology Corp.
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ISHII Hiromu
NTT Microsystem Integration Laboratories
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Sato Norio
Ntt Microsystem Integration Lab. Kanagawa Jpn
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MACHIDA Katsuyuki
NTT Microsystem Integration Laboratories
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KAMEI Toshikazu
NTT Advanced Technology Corp.
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MACHIDA Katsuyuki
NTT Advanced Technology Corporation
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Yano Masaki
NTT Advanced Technology Corp.
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Yano Masaki
Ntt Advanced Technology Corporation
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SAKATA Tomomi
NTT Microsystem Integration Laboratories
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YANO Masaki
NTT Advanced Technology Corporation, NTT Corporation
著作論文
- Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures
- Anti-Sticking Effect of Organic Dielectric Formed by Electrodeposition in Microelectromechanical-System Structures
- Thick Au High-Q Inductor and Its Chip-on-Chip Bonding on an RF IC for Various Frequencies
- Novel Structure and Fabrication Process for Integrated RF Microelectromechanical-System Technology
- Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices
- Integrated RF-MEMS Technology with Wafer-Level Encapsulation
- Thick-Dielectric Formation and MOSFET Reliability with Spin-Coating Film Transfer and Hot-Pressing Technique for Seamless Integration Technology
- Advanced Spin Coating Film Transfer and Hot-Pressing Process for Global Planarization with Dielectric-Material-Viscosity Control
- A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing
- Microfabrication Technology for Millimeter-Wave Photonic Systems on Si