SATO Norio | NTT Microsystem Integration Labs.

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著作論文

Selective Electrodeposition Technology for Organic Insulator Films on Microelectromechanical-System Structures
Thick Au High-Q Inductor and Its Chip-on-Chip Bonding on an RF IC for Various Frequencies
RF-MEMS Switch Structure for Low-Voltage Actuation and High-Density Integration
Novel Structure and Fabrication Process for Integrated RF Microelectromechanical-System Technology
Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices
Integrated RF-MEMS Technology with Wafer-Level Encapsulation
Thick-Dielectric Formation and MOSFET Reliability with Spin-Coating Film Transfer and Hot-Pressing Technique for Seamless Integration Technology
A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing

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